调整彩色滤光膜的致密性和疏水性以减少TFT-LCD制造中的气体释放

李吉; 张霞; 冯翊; 廖昌; 张杰; 尹勇明; 孟鸿

doi:10.37188/CO.EN-2023-0029

调整彩色滤光膜的致密性和疏水性以减少TFT-LCD制造中的气体释放

李吉^{1, 2, 4,},
张霞⁴,
冯翊^{2, 4},
廖昌⁴,
张杰⁴,
尹勇明^3, ,,
孟鸿^{1, 2, ,}

1.
北京大学材料科学与工程学院, 北京 100871
2.
北京大学深圳研究生院新材料学院, 深圳 518055
3.
深圳北理莫斯科大学材料科学系, 深圳 518172
4.
TCL华星光电技术有限公司, 深圳 518132

详细信息

中图分类号: TP394.1;TH691.9
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- 被引次数: 0
出版历程
- 收稿日期: 2023-11-15
- 修回日期: 2023-12-04
- 录用日期: 2023-12-14
- 网络出版日期: 2024-01-31

Adjusting the compactness and hydrophobicity of color filters to decrease gas release during TFT-LCD fabrication

doi: 10.37188/CO.EN-2023-0029

LI Ji^{1, 2, 4
,},
ZHANG Xia⁴,
FENG Yi^{2, 4},
LIAO Chang⁴,
ZHANG Jie⁴,
YIN Yong-ming^{3
, ,},
MENG Hong^{1, 2
, ,}

1.
School of Materials Science and Engineering, Peking University, Beijing 100871, China
2.
School of Advanced Materials, Shenzhen Graduate School, Peking University, Shenzhen 518055, China
3.
Department of Materials Science, Shenzhen MSU-BIT University, Shenzhen 518172, China
4.
TCL China Star Optoelectronics Technology Co., Ltd., Shenzhen 518132, China

Funds: Supported by National Natural Science Foundation of China (No. 62205058); Guangdong Basic and Applied Basic Research Foundation (No. 2021A1515110085); Shenzhen Fundamental Research Program (No. JSGG20220831103402005)

More Information

Author Bio:
LI Ji (1988—), male, born in Huanggang, Hubei province. In 2013, he received his master's degree from South China University of Technology. Currently, he is a PhD candidate at Peking University. He is mainly engaged in research and development of display materials. E-mail: liji02@stu.pku.edu.cn

YIN Yong-ming (1989—), male, born in Chenzhou, Hunan province. He obtained his degrees for Bachelor and Master from Jilin University, and then undertook his Ph.D. studies at Peking University from 2016 to 2020. Currently, he serves as an associate professor at Shenzhen MSU-BIT University. His research interests are in optoelectronics materials and devices for display applications. E-mail: yinyongming@smbu.edu.cn

MENG Hong (1966—), male, born in Huayin city, Shanxi province. Chair Professor, School of Advanced Materials, Shenzhen Graduate School, Peking University. He received his Ph. D. from the University of California, Los Angeles in 2002. His research interests are in organic optoelectronics materials and devices. E-mail: menghong@pku.edu.cn

Corresponding author: yinyongming@smbu.edu.cn; menghong@pku.edu.cn

摘要

摘要:
TFT-LCD产业正朝着高效率、低成本的方向发展。在TFT-LCD制造过程中，发现不同的光刻胶需要不同的真空干燥时间。为了减少制造时间，提高面板成品率，有必要明确影响真空时间的因素。本文探讨了抽运时间与光刻胶材料性能的关系。发现光刻胶的热稳定性与抽运时间的关系可以忽略不计。光刻胶的致密性和疏水性与真空干燥时间密切相关。致密性和高疏水性可以有效避免水蒸气在制造过程中侵入和储存在光刻胶中，减少泵送次数。总的来说，这项工作可以为未来TFT-LCD工业新型光刻胶的开发提供一定的参考。
- 液晶显示器 /
- 彩色滤光膜 /
- 气体释放 /
- 致密性 /
- 疏水性
Abstract:
The TFT-LCD industry is moving towards high efficiency and low costs. During the manufacturing process, it has been found that various photoresists require different vacuum drying times. To reduce manufacturing time and increase panel yields, clarifying the factors that can influence and reduce the vacuum time is necessary. This paper explored the relationship between pumping time and the properties of photoresist materials. It finds that the thermal stability of the photoresist has a negligible relationship with the pumping time. The compactness and hydrophobicity of the photoresist correlated strongly with the vacuum drying time. High compactness and high hydrophobicity can effectively prevent water vapor intrusion and storage in the photoresist during fabrication and consequently reduce pumping times. Overall, this work could guide the future development of new photoresists for the TFT-LCD industry.
- TFT-LCD /
- color filter /
- gas release /
- compactness /
- hydrophobicity

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Figure 1. Molecular structures of different monomers: G6-AG-001, G6-AG-002, DPEA-12 and DPCA-60.

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Figure 2. Three possible causes affecting the gas release from CFs. (a) Outgas from CFs; (b) low compactness and (c) low hydrophobicity of CFs

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Figure 3. Thermogravimetric analysis of PT-1 and PT-2. The samples were baked at 230 °C for 50 min, 210 °C for 60 min and 230 °C for 60 min, sequentially

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Figure 4. (a) The molecular structures of P1 and P2. (b) The schematic illustration of the porous structures. The red bars represent the crosslinking and the dotted circles represent the voids. P1 has large voids and P2 is more compact. (c) SEM images of sample A and sample B. (d) Pumping time of the two samples

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Figure 5. (a) Hydrophilic group and hydrophobic group in M2 and M3. (b) Contact angles of three samples, Sample E being the most hydrophobic. (c) Pumping time of three samples. (d) TGA curves of three pretreated samples by high temperature and humidity

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Figure 6. Optical morphology of Sample F

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Figure 7. Color image of fruits displayed on a TFT-LCD prototype using sample F as a green CF

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Table 1. Compositions of CFs

Compositions	Sample
Compositions	PT-1	PT-2	A	B	C	D	E	F
Color Paste	G58+Y138
Polymer (wt%)	P1	P1	P1	50% P1 50% P2	P1	P1	P1	50% P1 50% P2
Monomers	G6-AG-001 DPCA-60	G6-AG-001	G6-AG-001 DPEA-12	G6-AG-001 DPEA-12	G6-AG-001	G6-AG-001 G6-AG-002	G6-AG-001 DPCA-60	G6-AG-001 DPCA-60
Polymer/Monomer (wt%)	40%/60%	40%/60%	35%/65%	35%/65%	35%/65%	35%/65%	35%/65%	35%/65%
Photoinitiator (wt%)	0.15%
Additive (wt%)	0.15%
Solvent	PGMEA+MBA

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Table 2. Pumping time of vacuum drying and mass loss

Items	CF
Items	PT-1	PT-2
Pumping time/s	62.3	65.8
Mass loss (40−215 min)	2.46%	1.50%
Mass loss (0−30 min)	0.20%	0.85%

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Table 3. The thickness and shrinkage of the photoresist layer before and after UV exposure

Sample	Items
Sample	d₁/μm	d₂/μm	Shrinkage (%)	Pumping time/s
Sample A	2.04	2.04	0.37	7
Sample B	2.17	2.15	0.76	5.5

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Table 4. Data of the three samples CE

Sample	Monomer	Proportion	Contact angle/(°)	Developing time/s	Property	Mass loss	Pumping time/s
C	M1	100%	49.4	24	/	9.7%	7
D	M1+M2	70%+30%	48.6	21	More hydrophilic	23.4%	7.5
E	M1+M3	70%+30%	51.3	29	More hydrophobic	3.5%	3

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Table 5. Optical and VCD characteristics of reference CF and sample F

Item	Reference CF	Sample F
R_x	0.642	0.642
R_y	0.337	0.337
G_x	0.301	0.301
G_y	0.607	0.607
B_x	0.150	0.149
B_y	0.07	0.068
W_x	0.276	0.278
W_y	0.297	0.301
Tr%	5.85%	5.89%
NTSC	70.8%	71%
Pumping time/s	62.3	62

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