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Calibration of single optical wedge test system using computer-generated hologram

CAI Zhi-hua WANG Xiao-kun HU Hai-xiang CHENG Qiang WANG Ruo-qiu ZHANG Hai-dong

蔡志华, 王孝坤, 胡海翔, 程强, 王若秋, 张海东. 计算全息法标定单光楔补偿检测光路系统误差[J]. 中国光学. doi: 10.37188/CO.EN.2021-0004
引用本文: 蔡志华, 王孝坤, 胡海翔, 程强, 王若秋, 张海东. 计算全息法标定单光楔补偿检测光路系统误差[J]. 中国光学. doi: 10.37188/CO.EN.2021-0004
CAI Zhi-hua, WANG Xiao-kun, HU Hai-xiang, CHENG Qiang, WANG Ruo-qiu, ZHANG Hai-dong. Calibration of single optical wedge test system using computer-generated hologram[J]. Chinese Optics. doi: 10.37188/CO.EN.2021-0004
Citation: CAI Zhi-hua, WANG Xiao-kun, HU Hai-xiang, CHENG Qiang, WANG Ruo-qiu, ZHANG Hai-dong. Calibration of single optical wedge test system using computer-generated hologram[J]. Chinese Optics. doi: 10.37188/CO.EN.2021-0004

计算全息法标定单光楔补偿检测光路系统误差

doi: 10.37188/CO.EN.2021-0004

Calibration of single optical wedge test system using computer-generated hologram

More Information
    Author Bio:

    Cai Zhihua (1991—), male, from Dezhou, Shandong, PhD candidate, obtained a bachelor degree from Shandong Normal University in 2014, mainly engaged in optical design and testing technology Research E-mail: pe_dzcaizhihua@126.com

    Wang Xiaokun (1980—), male, from Danyang, Jiangsu, researcher, doctoral supervisor, obtained a bachelor degree from Jiangsu Normal University in 2003, and a doctorate degree from Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences in 2008, mainly engaged in optical manufacturing and Research on testing technology. E-mail: jimwxk@sohu.com

    Corresponding author: jimwxk@sohu.com
  • 摘要: 单光楔补偿检测法具有良好的适用性、鲁棒性和灵活性,但是在检测光路中存在多种误差耦合,误差解耦困难,影响了单光楔补偿检测的精度和可信度。针对这一问题,本文提出一种Computer Generation Hologram (CGH)标定单光楔补偿检测光路系统误差的新方法。文中首先分析了单光楔补偿检测法系统误差的来源,对CGH标定光楔补偿器的可行性进行了分析。结合工程实例,对口径为150 mm的单光楔补偿器设计了CGH,经分析可得CGH标定精度为1.98 nmRMS,CGH标定后单光楔补偿检测精度为3.43 nmRMS,该精度能够满足大口径凸非球面反射镜的高精度检测要求。结果表明CGH可以准确地标定单光楔补偿器的位姿和检测光路的系统误差,解决检测光路中误差解耦困难的问题,提高单光楔补偿检测的准确性和可靠性。使用CGH标定得到Tap#2和Tap#3的检测光路系统误差分别为0.023λRMS和0.011λRMS。
  • Figure  1.  (a) Single optical wedge test optical path. (b) Schematic of the test wavefront. Theoretical incident wavefront w1, actual incident wavefront w2, theoretical aspheric surface w3 and actual aspheric surface w4.

    Figure  2.  (a) Surface shape of the optical wedge A. (b) Surface shape of optical wedge B. (c) Transmitted wave aberration. (d) Transmission sphere system error. (e) Tap#1 non-null error. (f) Tap#2 non-null error. (g) Tap#3 non-null error.

    Figure  3.  Calibration of the single optical wedge test path.

    Figure  4.  Structure of the CGH.

    Figure  5.  Main area of the CGH. (a) Design residual. (b) Diffraction order energy level distribution. (c) Diffraction pattern. (d) Surface phase setting parameters.

    Figure  6.  Schematic of the single optical wedge deflection light path.

    Figure  7.  Alignment area. (a) Design residual. (b) Diffraction order energy level distribution. (c) Diffraction pattern.

    Figure  8.  Substrate error

    Figure  9.  Convex spherical stitching test result (D = 197 mm)

    a: Actual full-aperture surface b: Sub-plan c: Stitching test result d: The residual difference between the stitching test result and the full-aperture surface result

    Figure  10.  (a) Optical wedge compensator calibration optical path diagram. (b) CGH and interferometer aligned on the optical path. (c) Insertion the optical wedge compensator.

    Figure  11.  Calibration result for the test path system error (a) CGH alignment result by Tap#2. (b) Test path system error by Tap#2. (c) CGH alignment result by Tap#3. (d) Test path system error by Tap#3.

    Table  1.   Basic parameters

    Sub-aperture planning
    ItemTap#1Tap#2Tap#3
    Number1/218/2112/21
    Off-axis/mm0145175
    Subaperture/mm118114116
    Departure/μm0.7419.228.5
    Need compensation×
    Optical wedge structure parameters
    Diameter /mm150150
    Center thickness /mm2020
    Tilt/°3.20.77
    Wedge/°6.36.3
    MaterialF_SilicaF_Silica
    下载: 导出CSV

    Table  2.   Adjustment tolerance analysis of optical wedge compensator

    Adjustment toleranceTest systemCalibration system
    Wedge-interferometer. dist.0.15 mm0.05 mm
    Wedge-mirror. dist.0.15 mm0.05 mm
    x-tilt0.005°0.0015°
    y-tilt0.01°0.001°
    Eccentric eccentricity3 mm0.05 mm
    RMS9.21×10−3λ8.35×10−3λ
    下载: 导出CSV

    Table  3.   CGH fringe contrast

    Diffraction orderAmplitude CGHPhase CGH
    073.05%
    ±193.09%61.08%
    ±378.92%99.97%
    ±554.01%87.29%
    下载: 导出CSV

    Table  4.   CGH error

    CGH errorValue
    Design residual1.77×10−5λ
    coding error9.00×10−4λ
    substrate error3.00×10−3λ
    characterization distortion1.57×10−4λ
    RMS3.10×10−3λ
    下载: 导出CSV

    Table  5.   Single optical wedge compensation test accuracy after CGH calibration

    ErrorValue
    Measuring random error2.5 nm
    CGH calibration test optical path system error1.98 nm
    Accuracy of stitching algorithm1.26 nm
    RMS3.43 nm
    下载: 导出CSV
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  • 网络出版日期:  2021-06-18

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