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非球面光学元件的面形检测技术

师途 杨甬英 张磊 刘东

师途, 杨甬英, 张磊, 刘东. 非球面光学元件的面形检测技术[J]. 中国光学, 2014, 7(1): 26-46. doi: 10.3788/CO.20140701.026
引用本文: 师途, 杨甬英, 张磊, 刘东. 非球面光学元件的面形检测技术[J]. 中国光学, 2014, 7(1): 26-46. doi: 10.3788/CO.20140701.026
SHI Tu, YANG Yong-ying, ZHANG Lei, LIU Dong. Surface testing methods of aspheric optical elements[J]. Chinese Optics, 2014, 7(1): 26-46. doi: 10.3788/CO.20140701.026
Citation: SHI Tu, YANG Yong-ying, ZHANG Lei, LIU Dong. Surface testing methods of aspheric optical elements[J]. Chinese Optics, 2014, 7(1): 26-46. doi: 10.3788/CO.20140701.026

非球面光学元件的面形检测技术

doi: 10.3788/CO.20140701.026
基金项目: 

国家自然科学基金资助项目(No.11275172);中央高校基本科研业务费专项资金资助项目(No.2013QNA5006);现代光学仪器国家重点实验室创新基金资助项目(No.MOI201208)

详细信息
    作者简介:

    师途(1991—),女,河北宁晋人,博士研究生,2012年于南京理工大学获得学士学位,主要从事非球面检测方面的研究。E-mail:shitu0209@163.com

    通讯作者: 刘东,E-mail:liudongopt@zju.edu.cn
  • 中图分类号: TQ171.65;TN247;TH741

Surface testing methods of aspheric optical elements

  • 摘要: 介绍了非球面各加工阶段的面形检测技术及其最新进展,重点介绍了非球面精密抛光期的面形检测技术,并对其中的非零位子孔径拼接干涉检测法和部分补偿法进行了详细阐述,提出了适用于大口径、深度非球面面形检测的组合干涉法的概念。概述了近年来受到关注的自由曲面非球面的发展和检测技术现状,展望了非球面检测技术的发展趋势。
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出版历程
  • 收稿日期:  2013-10-17
  • 修回日期:  2013-12-14
  • 刊出日期:  2014-01-25

非球面光学元件的面形检测技术

doi: 10.3788/CO.20140701.026
    基金项目:

    国家自然科学基金资助项目(No.11275172);中央高校基本科研业务费专项资金资助项目(No.2013QNA5006);现代光学仪器国家重点实验室创新基金资助项目(No.MOI201208)

    作者简介:

    师途(1991—),女,河北宁晋人,博士研究生,2012年于南京理工大学获得学士学位,主要从事非球面检测方面的研究。E-mail:shitu0209@163.com

    通讯作者: 刘东,E-mail:liudongopt@zju.edu.cn
  • 中图分类号: TQ171.65;TN247;TH741

摘要: 介绍了非球面各加工阶段的面形检测技术及其最新进展,重点介绍了非球面精密抛光期的面形检测技术,并对其中的非零位子孔径拼接干涉检测法和部分补偿法进行了详细阐述,提出了适用于大口径、深度非球面面形检测的组合干涉法的概念。概述了近年来受到关注的自由曲面非球面的发展和检测技术现状,展望了非球面检测技术的发展趋势。

English Abstract

师途, 杨甬英, 张磊, 刘东. 非球面光学元件的面形检测技术[J]. 中国光学, 2014, 7(1): 26-46. doi: 10.3788/CO.20140701.026
引用本文: 师途, 杨甬英, 张磊, 刘东. 非球面光学元件的面形检测技术[J]. 中国光学, 2014, 7(1): 26-46. doi: 10.3788/CO.20140701.026
SHI Tu, YANG Yong-ying, ZHANG Lei, LIU Dong. Surface testing methods of aspheric optical elements[J]. Chinese Optics, 2014, 7(1): 26-46. doi: 10.3788/CO.20140701.026
Citation: SHI Tu, YANG Yong-ying, ZHANG Lei, LIU Dong. Surface testing methods of aspheric optical elements[J]. Chinese Optics, 2014, 7(1): 26-46. doi: 10.3788/CO.20140701.026
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