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极紫外光学器件辐照污染检测技术

王珣 金春水 匡尚奇 喻波

王珣, 金春水, 匡尚奇, 喻波. 极紫外光学器件辐照污染检测技术[J]. 中国光学(中英文), 2014, 7(1): 79-88. doi: 10.3788/CO.20140701.079
引用本文: 王珣, 金春水, 匡尚奇, 喻波. 极紫外光学器件辐照污染检测技术[J]. 中国光学(中英文), 2014, 7(1): 79-88. doi: 10.3788/CO.20140701.079
WANG Xun, JIN Chun-shui, KUANG Shang-qi, YU Bo. Techniques of radiation contamination monitoring for extreme ultraviolet devices[J]. Chinese Optics, 2014, 7(1): 79-88. doi: 10.3788/CO.20140701.079
Citation: WANG Xun, JIN Chun-shui, KUANG Shang-qi, YU Bo. Techniques of radiation contamination monitoring for extreme ultraviolet devices[J]. Chinese Optics, 2014, 7(1): 79-88. doi: 10.3788/CO.20140701.079

极紫外光学器件辐照污染检测技术

doi: 10.3788/CO.20140701.079
基金项目: 

国家科技重大专项(02专项)资助项目

详细信息
    作者简介:

    王珣(1987—),男,辽宁大连人,博士研究生,2010年于沈阳理工大学获得学士学位,主要从事极紫外多层膜技术等方面的研究。E-mail:gocga@126.com

    通讯作者:

    金春水,E-mail:jincs@sklao.ac.cn

  • 中图分类号: O484.5;O434.19

Techniques of radiation contamination monitoring for extreme ultraviolet devices

  • 摘要: 总结并讨论了极紫外光刻技术中,有关极紫外光学器件受辐照污染的在线检测方法。简要介绍了极紫外光刻系统的原理、反射镜膜层结构以及表面污染产生的机理;指出光刻系统中在线检测的技术要求;分析了目前几种主要表面检测技术的特点;给出了每种方法在极紫外光学系统中的应用潜力;最后,指出光纤椭偏仪在极紫外光学系统的在线表面污染检测中具有良好的应用前景。

     

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出版历程
  • 收稿日期:  2013-10-11
  • 修回日期:  2013-12-13
  • 刊出日期:  2014-01-25

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