Manufacturing and testing of rectangular off-axis aspheric mirror with double-swing polishing method
-
摘要: 介绍了一种轻质矩形离轴非球面反射镜的加工与检测方法.针对矩形离轴非球面镜这种直角效应的加工难点,提出双摆式加工工艺,并设计改造双摆式加工机床使该方法得以实现.采用该方法加工完成某多光谱仪光学系统中4块矩形离轴非球面反射镜(其中最大尺寸为266 mm110 mm),最终加工得到的面形精度均优于0.020(RMS, @633 mm)的设计指标要求.加工结果表明,用该加工技术既提高了光学加工效率又利于得到较为平滑的面形质量.Abstract: A kind of manufacturing and testing method for rectangular off-axis aspheric lightweight mirror is introduced. In order to overcome the corner effect, double-swing polishing(DSP) method is proposed. A DSP machine is made to achieve satisfying manufacturing result. The DSP and the 4-pole method are successfully applied for manufacturing optical system in the spectrometer. Four rectangular off-axis aspheric mirrors with the largest size of 266 mm110 mm are polished, and the final surface precision figures are better than 0.020(RMS, @633 nm). Manufacturing result shows that the double-swing polishing method improves the polishing efficiency and reduces the optical surface medium frequency error.
-
Key words:
- optical manufacture /
- off-axis aspheric surface /
- double-swing /
- 4-pole method
-
[1] 丁蛟腾,许亮,马臻,等. 矩形口径离轴非球面镜的加工与检测[J]. 光学技术,2012,38(5):607-610. DING J T,XU L,MA ZH. Manufacture and test of rectangle aperture off-axis aspheric mirror[J]. Optical Technique,2012,38(5):607-610.(in Chinese)
[2] 廖文林,戴一帆,周林,等. 离子束抛光加工矩形离轴非球面镜[J]. 国防科技大学学报,2011,33(1):100-104. LIAO W L,DAI Y F,ZHOU L,et al.. Ion beam figuring for rectangular off-axis aspheric mirrors[J]. J. National University of Defense Technology,2011,33(1):100-104.(in Chinese)
[3] ROBERT A J. Fabrication using the computer controlled polisher[J]. Applied Optics,1978,17(12):1889-1891.
[4] BOGDANOV A P. Automation of planning of technological process for machining high-precision optical components[J]. Sov. J. Opt. Technol,1984,51(9):539-541.
[5] 邓伟杰,郑立功,史亚莉,等. 离轴非球面抛光路径的自适应规划[J]. 光学精密工程,2009,17(1): 65-71. DENG W J,ZHENG L G,SHI Y L,et al.. Adaptive programming algorithm for generating polishing tool-path in computer controlled optical surfacing[J]. Opt. Precision Eng.,2009,17 (1):65-71.(in Chinese)
[6] 郑立功,张学军,张峰. 矩形离轴非球面的数控加工[J]. 光学精密工程,2004,12(1): 113-117. ZHENG L G,ZHANG X J,ZHANG F. NC surfacing of two off-axis aspheric mirrors[J]. Opt. Precision Eng.,2004,12(1):113-117.(in Chinese)
[7] SONG C,DAVID W,YU G Y. Misfit of rigid tools and interferometer subapertures on off-axis aspheric mirror segments[J]. Optics Engineering,2011,50(7):073401.
[8] 潘君骅. 光学非球面的设计、加工与检验[M].北京:科学出版社,1991:142-158. PAN J H. The Design, Manufacture and Test of Aspherical Optical Surfaces[M]. Beijing:Science Press,1991:168-179.(in Chinese)
[9] WANG P,LI J F,XUAN B,et al.. Double-swing method used for polishing off-axis aspherical mirrors[J]. SPIE,2009,7282:728203.
[10] 李俊峰,宋淑梅. 应用双摆动技术加工离轴碳化硅反射镜[J]. 光学精密工程,2012,20(8):1671-1675. LI J F,SONG SH M. Applying the double-swing method for manufacturing the SiC off-axis aspheric mirror[J]. Opt. Precision Eng.,2012,20 (8):1671-1675.(in Chinese)
[11] MALACARA D. Optical Shop Testing[M]. Hoboken:John Wiley& Sons Inc.,1978:444-454.
[12] XUAN B,CHENG X P,WANG P,et al.. Alignment of off-axis asphere and compensator with four poles[J]. SPIE,2009,7283:72830A. -
计量
- 文章访问数: 1589
- HTML全文浏览量: 263
- PDF下载量: 631
- 被引次数: 0
下载:
