Micro spatial modulation Fourier transform infrared spectrometer
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摘要: 针对目前环境、医疗、空间、气象、军事及安全等领域对傅里叶变换红外光谱仪微小型化、轻量化及固态化的迫切需求,提出并研究了一种以MOEMS多级微反射镜为核心器件的空间调制微型傅里叶变换红外光谱仪。在理论研究方面,建立了空间调制微型傅里叶变换红外光谱仪的物理模型,探究了该系统的光场分割与空间采样的光学原理;分析了多级微反射镜的衍射效应,提出了一种通过补边抑制衍射噪声抑制方法;进行了多级微反射镜采样误差的分析,并提出了基于最小二乘拟合的修正算法;通过对光源空间相干性、准直系统像差以及入射光场均匀性的分析,确定了光学系统的总体设计指标;通过对多级微反射镜基片加工精度、分束器材料色散特性和膜层透射效率等的计算分析,确定了干涉系统的设计方法与技术参数。在核心技术方面,提出了两个多级微反射镜的3种制作方法,分析了制作误差的来源及对系统性能的影响。通过工艺设计及实验条件探索,分别采用电铸法、真空镀膜法以及斜面倾角叠片法制作了两个多级微反射镜。在系统设计方面,进行了红外准直与缩束系统的光学设计,对整体光机系统进行了建模仿真,分析了杂散光噪声的来源。在图谱处理方面,利用过零采样方式,通过图像分割算法,获取了干涉图采样序列;通过对干涉图序列的插值、补零、延拓与卷积方法,完成了光谱相位误差的校正;通过离散傅里叶变换解调,实现了由干涉图像到信号光谱的数据反演。最后研究了系统光机整体的集成组装技术,并对原理样机进行了实验测试。本文研制的空间调制微型傅里叶变换红外光谱仪的特点在于:取消了动镜驱动机构与采样控制机构,具有微小型与轻量化的特点;干涉图的采样由多级微反射镜完成,其空间采样的方式增加了系统的稳定性与可靠性,实时采样的特点增加了系统的快速性与有效性;多级微反射镜阵列采用MOEMS工艺技术制作,增加了系统的采样精度。该光谱仪系统的结构及制作方法具有自主知识产权,并具有广阔的应用前景。
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关键词:
- 红外光谱仪 /
- 傅里叶变换红外光谱仪 /
- 微型 /
- 微光机电系统
Abstract: According to the urgent requirement to the microminiature, lightweight, and staticize on Fourier transform infrared spectrometer in the field of environment, medical treatment, space exploration, meteorology, military and security, a spatial modulation Fourier transform infrared spectrometer based on MOEMS micro multi-step mirrors(MMSMs) was proposed. In theory, the physical model and the optical principle of spatial modulation Fourier transform infrared spectrometer was built and researched. A method of leaving extra patches in the boundary to suppress diffraction noise was put forward, and an algorithm based on the least-squares approximation was proposed to correct sampling error. According to the analyzing on the fabrication accuracy of MMSMs, the dispersion characteristics and the transmission efficiency of the beam splitter, the design method and the technical parameters were determined. In the core technology, three different kinds of manufacture method of MMSMs were put forward. By ways of analyzing the origin of the error, the tolerance of two MMSMs was given. The two MMSMs were completed by the method of electroform, positioning of the growth multilayer film, and inclined plane method respectively. In the system design, the infrared collimation system and imaging system were designed and manufactured. According to modeling simulation of the whole machine system, the source of stray light noise was analyzed. In the interferogram processing, using zero crossing sampling model and image segmentation algorithm, the sampling sequence was obtained. By interpolation, zero filling, continuation and convolution of the interference sequence, the phase error of spectrum was corrected. After that, the spectrum was obtained from the interferogram via discrete Fourier transform. Finally, the integration and coupling technology of the system were researched. The characteristics of infrared spectrometer developed in this project were as follows:Firstly, the moving mirror driven mechanism and the sampling control mechanism were cancelled, hence, micro-miniature and lightweight were realized. Secondly, the spatial sampling mode through MMSMs increased the stability and reliability; the characteristics of real-time sampling decreased time wastage and enhanced the optical efficiency. Thirdly, the MMSMs fabricated by MOEMS technology increased the sampling precision. Therefore, the infrared spectrometer designed by us has a great application prospect. -
图 1 微型空间调制FTIR结构示意图
Figure 1. Schematic diagram of micro spatial modulation Fourier transform infrared spectrometer
图 3 3×3模式光程差阵列与干涉图像示意图
Figure 3. Chart of OPDs array and interferogram image in 3×3 mode
图 5 光谱复原质量函数与衍射距离的关系曲线
Figure 5. Relationship curves between the spectrum quality and diffraction distance
图 6 光谱相关度与标准偏差的关系曲线
Figure 6. Relationship curve between spectrum correlation and standard deviation
图 11 干涉图调制函数与光程差的关系曲线
Figure 11. Relationship between interferogram modulation and OPD
图 13 电铸工艺制作的含有2级、4级、8级和16级台阶结构的多级微反射镜
Figure 13. Structure of micro multi-step mirrors with 2 steps, 4 steps, 8 steps and 16 steps by electroform
图 14 电铸工艺制作的第一多级微反射镜照片
Figure 14. Picture of the first micro multi-step by electroform
图 20 斜面法制作多级微反射镜示意图
Figure 20. Fabrication method of micro multi-step mirrors by inclined plane method
图 23 光谱复原质量函数随厚度偏差与角度偏差的变化
Figure 23. Relationship of spectrum quality versus thickness deviation and angle deviation
图 24 第二多级微反射镜的照片
Figure 24. Picture of the second micro step mirror fabricated by inclined plane method
图 28 透射效率与光强反射率之间的关系曲面图
Figure 28. Surface plots of transmission efficiency with intensity reflectance R1 and R2
图 31 相位误差与光程差之间的关系曲线
Figure 31. Relationship curve between phase error and optical path difference
图 32 分束器与补偿板的光强透过率曲线
Figure 32. Transmittance curves of beam splitter and compensating plate
图 42 不同光阑口径下点源透过率随离轴角变化
Figure 42. PST versus off-field angle at different stop diameter
图 45 利用不同的相位校正方法反演的光谱
Figure 45. Recovered spectrum reversed by different phase correction methods
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[1] [1] 孔延梅,梁静秋,梁中翥,等.调制光谱仪的微型化研究进展[J].半导体光电,2008,29(1):1-5. KONG Y M,LIANG J Q,LIANG ZH Z,et al.. Developments of the micro modulating spectrometers[J]. Semiconductor Optoelectronics,2008,29(1):1-5.(in Chinese) [2] [2] KONG Y M,LIANG J Q,LIANG ZH ZH,et al.. Micro assembled Fourier transform spectrometer[J]. SPIE,2009,7283:728304. [3] [3] KONG Y M,LIANG J Q,LIANG ZH ZH,et al.. Novel micro Fourier transform spectrometer[J]. Semiconductor Photonics and Technology,2008,14(1):8-12. [4] [4] LIANG J Q,LIANG ZH ZH,LV J G,et al.. Simulation and experiment of the static FTIR based on micro multi-step mirrors[J]. SPIE,2011,8191:819104. [5] [5] LV J G,LIANG J Q,LIANG ZH ZH,et al.. Design and manufacture of micro interference system in spatial modulation Fourier transform spectrometer[J]. Key Engineering Materials,2013,562-565:973-978. [6] [6] 孔延梅,梁静秋,王波,等.新型空间调制微型傅里叶变换光谱仪的设计与仿真[J].光谱学与光谱分析,2009,29(4):1142-1146. KONG Y M,LIANG J Q,WANG B,et al.. The investigation and simulation of a novel spatially modulated micro-Fourier transform spectrometer[J]. Spectroscopy and Spectral Analysis,2009,29(4):1142-1146.(in Chinese) [7] [7] 吕金光,梁静秋,梁中翥.基于微光机电系统的傅里叶变换红外光谱仪[J].光学精密工程,2011,19(增刊):85-91. LV J G,LIANG J Q,LIANG ZH ZH. Infrared Fourier transform spectrometer based on MOEMS technology[J]. Opt. Precision Eng.,2011,19(supp):85-91.(in Chinese) [8] [8] 孔延梅.可见-近红外微型傅里叶变换光谱仪的设计与仿真研究[D].长春:中国科学院长春光学精密机械与物理研究所,2009:29-31. KONG Y M. Design and simulation of the micro Fourier transform spectrometer based on MOEMS in visible-near infrared[D]. Changchun:Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,2009:29-31.(in Chinese) [9] [9] 吕金光,梁静秋,梁中翥.窄带傅里叶变换光谱仪中平稳高斯噪声的理论分析[J].物理学报, 2012,61(7):070704. LV J G,LIANG J Q,LIANG ZH ZH. Theoretical analysis on stationary Gaussian randomnoise in narrowband Fourier transform spectrometer[J]. Acta Phys. Sin.,2012,61(7):070704.(in Chinese) [10] [10] 付建国.静态傅里叶变换红外光谱仪的光学系统总体设计与仿真研究[D].长春:中国科学院长春光学精密机械与物理研究所,2012:31-33. FU J G. Optical system design and simulation for static Fourier-transform infrared spectrometer[D]. Changchun:Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,2012:31-33.(in Chinese) [11] [11] 吕金光.空间调制傅里叶变换红外光谱仪系统设计与信息处理研究[D].长春:中国科学院长春光学精密机械与物理研究所,2013:33-35. LV J G. System design and information processing of spatial modulation Fourier transform infrared spectrometer[D]. Changchun:Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,2013:33-35.(in Chinese) [12] [12] FENG C,WANG B,LIANG ZH ZH,et al.. Miniaturization of step mirrors in a static Fourier transform spectrometer:theory and simulation[J]. J. Opt. Soc. Am. B,2011,28(1):128-133. [13] [13] 付建国,梁静秋,梁中翥.基于多级微反射镜的傅里叶变换红外光谱仪衍射效应分析[J].光谱学与光谱分析,2010,30(12):3203-3207. FU J G,LIANG J Q,LIANG ZH ZH. Analysis of diffraction in Fourier-transform infrared spectrometer basedon step mirrors[J]. Spectroscopy and Spectral Analysis,2010,30(12):3203-3207.(in Chinese) [14] [14] 冯聪.基于多级微反射镜的傅里叶变换红外光谱仪杂散光分析[D].长春:中国科学院长春光学精密机械与物理研究所,2011,19-29:36-50. FENG C. Stray-light analysis of Fourier transform infrared spectrometer based onmultistep mirrors[D]. Changchun:Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,2011,19-29:36-50.(in Chinese) [15] [15] FENG C,LIANG J Q,LIANG ZH ZH. Spectrum constructing with nonuniform sample using least-squares approximation by cosine polynomials[J]. Applied Optics,2011,50(34):6377-6383. [16] [16] 付建国,梁静秋,梁中翥.扩展光源对微型FTIR光谱复原的影响分析[J].光谱学与光谱分析,2011,31(6):1723-1726. FU J G,LIANG J Q,LIANG ZH ZH. Influence of extended light source on spectral reconstruction in a microFTIR[J]. Spectroscopy and Spectral Analysis,2011,31(6):1723-1726.(in Chinese) [17] [17] 吕金光,梁中翥,付建国,等.基于多级微反射镜的傅里叶变换红外光谱仪中准直误差的分析[J].光谱学与光谱分析, 2011,31(10):2865-2869. LV J G,LIANG ZH ZH,FU J G,et al.. Analysis of collimation error in Fourier transform infrared spectrometer based on step mirrors[J]. Spectroscopy and Spectral Analysis,2011,31(10):2865-2869.(in Chinese) [18] [18] 吕金光,梁静秋,梁中翥,等.空间调制型傅里叶变换光谱仪光场的均匀性研究[J].光谱学与光谱分析,2012,32(1):259-263. LV J G,LIANG J Q,LIANG ZH ZH,et al.. Study on uniformity of optical field in static Fourier transformspectrometer[J]. Spectroscopy and Spectral Analysis,2012,32(1):259-263.(in Chinese) [19] [19] 王波,梁中翥,孔延梅,等.用于微型光谱仪的硅基多级微反射镜的设计与制作研究[J].物理学报,2010,59(2):907-912. WANG B,LIANG ZH ZH,KONG Y M,et al.. Design and fabrication ofmicro mult-imirrors based on silicon for micro-spectrometer[J]. Acta Phys. Sin.,2010,59(2):907-912.(in Chinese) [20] [20] LIANG ZH ZH,FU J G,FENG C,et al.. Design and demonstration of micro multi-step mirrors and light source in micro FTIR[C]. Proceedings of the 20116th IEEE International coference on Nano/Micro Engineered and Molecular Systems. Kaohsiung,Taiwan,China,Feb.,2011. [21] [21] 王波.可见-近红外微型空间调制光谱仪关键技术研究[D].长春:中国科学院长春光学精密机械与物理研究所,2010:67-77. WANG B. Study of the key technology of the micro Fourier transform spectrometer in visable-infrared[D]. Changchun:Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,2010:67-77.(in Chinese) [22] [22] 郑莹,梁中翥,梁静秋.红外光谱仪多级微反射镜模拟分析及制作研究[J].光学学报,2011,31(12):1222005. ZHENG Y,LIANG Z Z,LIANG J Q. Simulation and fabrication of multi-micromirrorsused in infrared spectrometer[J]. Acta Optica Sinica,2011,31(12):1222005.(in Chinese) [23] [23] ZHENG Y,LIANG J Q,LIANG ZH ZH. Design and fabrication of step mirrors used in space-modulated Fourier transform infrared spectrometer[J]. Optics Express,2013,21(1):884-892 [24] [24] 郑莹.静态傅里叶变换红外光谱仪关键器件研究[D].长春:中国科学院长春光学精密机械与物理研究所,2013:72-78. ZHENG Y. Study of key components used in static Fourier transform infrared spectrometer[D]. Changchun:Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,2013:72-78.(in Chinese) [25] [25] 吕金光,梁静秋,梁中翥.多级反射镜阵列Monte Carlo法误差合成与统计分析[J].物理学报,2012,61(22):220701. LV J G,LIANG J Q,LIANG ZH ZH. Error synthesis and statistical analysis on steppedmirror array by Monte Carlo method[J]. Acta Phys. Sin.,2012,61(22):220701.(in Chinese) [26] [26] 吕金光,梁静秋,梁中翥,等.空间调制傅里叶变换红外光谱仪干涉系统透射效率研究[J].光谱学与光谱分析,2013,33(3):850-854. LV J G,LIANG J Q,LIANG ZH ZH,et al.. Study on transmission efficiency of interference system in spatially modulated Fourier transformspectrometer[J]. Spectroscopy and Spectral Analysis,2013,33(3):850-854.(in Chinese) [27] [27] 吕金光,梁静秋,梁中翥.空间调制傅里叶变换光谱仪分束器色散特性研究[J].物理学报,2012,61(14):140702. LV J G,LIANG J Q,LIANG ZH ZH. Study on chromatic dispersion of beam splitter inspatially modulated Fourier transform spectrometer[J]. Acta Phys. Sin.,2012,61(14):140702.(in Chinese) [28] [28] 吕金光,梁静秋,梁中翥,等.空间调制傅里叶变换红外光谱仪分束器楔形误差分析[J].光学学报, 2014,34(10):1030001. LV J G,LIANG J Q,LIANG ZH ZH,et al.. Analysis of wedge error of beam splitter in spatial modulation Fourier transform infrared spectrometer[J]. Acta Optica Sinica,2014,34(10):1030001.(in Chinese) [29] [29] 付建国,梁静秋,梁中翥.一种静态傅里叶变换红外光谱仪的光学系统分析与设计[J].光学学报,2012,32(2):0222006. FU J G,LIANG J Q,LIANG ZH ZH. Analysis and design for the optical system of a static infrared Fourier transform spectrometer[J]. Acta Optica Sinica,2012,32(2):0222006.(in Chinese) [30] [30] 姜承志,梁静秋,梁中翥,等.准直系统对静态傅里叶变换光谱仪的影响[J].光谱学与光谱分析,2014,34(1):274-278. JIANG C Z,LIANG J Q,LIANG ZH ZH,et al.. Influence of collimation system on static Fourier transform spectrometer[J]. Spectroscopy and Spectral Analysis,2014,34(1):274-278.(in Chinese) [31] [31] 付建国,梁静秋,梁中翥.静态傅里叶变换红外光谱仪的公差分析[J].光学学报,2012,32(6):0607002. FU J G,LIANG J Q,LIANG ZH ZH. Tolerance analysis for a static Fourier-transform infrared spectrometer based on multi-micro mirrors[J]. Acta Optica Sinica,2012,32(6):0607002.(in Chinese) [32] [32] 吕金光,梁静秋,梁中翥.空间采样傅里叶变换光谱仪光谱反演研究[J].光谱学与光谱分析,2012,32(6):1694-1699. LV J G,LIANG J Q,LIANG ZH ZH. Study on spectrum inversion of spatially modulated Fourier transformspectrometer[J]. Spectroscopy and Spectral Analysis,2012,32(6):1694-1699.(in Chinese) [33] [33] 郑莹,梁静秋,梁中翥.空间调制傅里叶变换红外光谱仪多级微反射镜倾斜误差分析[J].光谱学与光谱分析,2012,32(7):1999-2002. ZHENG Y,LIANG J Q,LIANG ZH ZH. Analysis of multi-micromirrors tilt error in space-modulated Fourier transform infrared spectrometry[J]. Spectroscopy and Spectral Analysis,2012,32(7):1999-2002.(in Chinese) -
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