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基于衍射光栅的干涉式精密位移测量系统

吕强 李文昊 巴音贺希格 柏杨 刘兆武 王玮

吕强, 李文昊, 巴音贺希格, 柏杨, 刘兆武, 王玮. 基于衍射光栅的干涉式精密位移测量系统[J]. 中国光学(中英文), 2017, 10(1): 39-50. doi: 10.3788/CO.20171001.0039
引用本文: 吕强, 李文昊, 巴音贺希格, 柏杨, 刘兆武, 王玮. 基于衍射光栅的干涉式精密位移测量系统[J]. 中国光学(中英文), 2017, 10(1): 39-50. doi: 10.3788/CO.20171001.0039
LV Qiang, LI Wen-hao, Bayanheshig, BAI Yang, LIU Zhao-wu, WANG Wei. Interferometric precision displacement measurement system based on diffraction grating[J]. Chinese Optics, 2017, 10(1): 39-50. doi: 10.3788/CO.20171001.0039
Citation: LV Qiang, LI Wen-hao, Bayanheshig, BAI Yang, LIU Zhao-wu, WANG Wei. Interferometric precision displacement measurement system based on diffraction grating[J]. Chinese Optics, 2017, 10(1): 39-50. doi: 10.3788/CO.20171001.0039

基于衍射光栅的干涉式精密位移测量系统

doi: 10.3788/CO.20171001.0039
基金项目: 

国家重大科研仪器设备研制专项 61227901

详细信息
    作者简介:

    吕强(1992-), 男, 山东德州人, 硕士研究生, 2014年于山东师范大学获得学士学位, 主要从事光栅精密位移测量等方面的研究。E-mail:lq_0119@126.com

    通讯作者:

    李文昊, E-mail:leewenho@163.com

  • 中图分类号: TN247;TH744.3

Interferometric precision displacement measurement system based on diffraction grating

Funds: 

the National Science and Technology Major Project of the Ministry of Science and Technology of China 61227901

More Information
  • 摘要: 介绍了基于几何莫尔条纹原理和衍射干涉原理的两种光栅精密位移测量系统及各自的特点。综述了国内外对光栅干涉式精密位移测量系统的研究进展,总结了系统存在的关键问题及发展趋势。光栅干涉式精密位移测量系统的优点是对环境要求小,测量分辨率和精度较高,结构紧凑,成本低。该系统需要解决的问题包括提高光栅以及光学元器件制造和安装精度;寻求一种更高精度的检测手段对光栅位移测量系统进行标定等。光栅干涉式精密位移测量系统的发展方向为更高测量分辨率和精度,大量程、多维度测量以及尺寸小巧。该系统在现代工业加工精密制造领域将具有更广阔的应用前景。

     

  • 图 1  基于几何莫尔条纹原理的光栅位移测量系统结构简图

    Figure 1.  Schematic diagram of the grating displacement measurement system based on the principle of geometric Moire fringe

    图 2  基于衍射干涉原理的光栅位移测量系统结构简图

    Figure 2.  Schematic diagram of the grating displacement measurement system based on the principle of diffraction and interference

    图 3  Heidenhain公司衍射光栅干涉式位移测量系统原理图

    Figure 3.  Schematic diagram of the diffraction grating interferometer displacement measurement system in Heidenhain

    图 4  三光栅系统原理图

    Figure 4.  Schematic diagram of three-grating system

    图 5  LIP382系统原理图

    Figure 5.  Schematic diagram of LIP382

    图 6  微型光栅位移测量系统原理图

    Figure 6.  Schematic diagram of micro diffraction grating interferometer displacement measurement system

    图 7  Bird′s Eye Control系统原理图

    Figure 7.  Schematic diagram of Bird′s Eye Control system

    图 8  6自由度测量系统原理图

    Figure 8.  Conceptual design of the six-DOF surface encoder combined with a three-DOF displacement assembly and a three-DOF angle assembly

    图 9  光栅干涉位移测量系统光路图

    Figure 9.  Schematic diagram of optical setup

    图 10  二次衍射系统原理图

    Figure 10.  Schematic diagram of double diffraction system

    图 11  采用Littrow结构的光栅位移测量系统原理图

    Figure 11.  Schematic diagram of diffraction grating interferometer displacement measurement system with Littrow structure

    图 12  采用单倍望远镜结构的光栅位移测量系统原理图

    Figure 12.  Schematic diagram of diffraction grating interferometer displacement measurement system with DiLENS configuration

    图 13  6-DOF测量系统原理图

    Figure 13.  Optical configuration for 6-DOF measurement system

    图 14  外差光栅位移测量系统原理图

    Figure 14.  Schematic diagram of the novel heterodynegrating interferometer system

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  • 收稿日期:  2016-08-22
  • 修回日期:  2016-09-16
  • 刊出日期:  2017-02-01

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