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大偏离度非球面检测畸变校正方法

高松涛 武东城 苗二龙

高松涛, 武东城, 苗二龙. 大偏离度非球面检测畸变校正方法[J]. 中国光学(中英文), 2017, 10(3): 383-390. doi: 10.3788/CO.20171003.0383
引用本文: 高松涛, 武东城, 苗二龙. 大偏离度非球面检测畸变校正方法[J]. 中国光学(中英文), 2017, 10(3): 383-390. doi: 10.3788/CO.20171003.0383
GAO Song-tao, WU Dong-cheng, MIAO Er-long. Distortion correcting method when testing large-departure asphere[J]. Chinese Optics, 2017, 10(3): 383-390. doi: 10.3788/CO.20171003.0383
Citation: GAO Song-tao, WU Dong-cheng, MIAO Er-long. Distortion correcting method when testing large-departure asphere[J]. Chinese Optics, 2017, 10(3): 383-390. doi: 10.3788/CO.20171003.0383

大偏离度非球面检测畸变校正方法

doi: 10.3788/CO.20171003.0383
基金项目: 

国家科技重大专项资助项目 2009ZX02205

详细信息
    作者简介:

    高松涛(1985-), 男, 河南郏县人, 博士, 助理研究员, 主要从事高精度非球面面形检测技术方面的研究。E-mail:gaost965@126.com

    通讯作者:

    高松涛, E-mail:gaost965@126.com

  • 中图分类号: O436.1

Distortion correcting method when testing large-departure asphere

Funds: 

National Science and Technology Major Project of China 2009ZX02205

  • 摘要: 在高数值孔径(NA)投影光刻物镜中,随着数值孔径的增加,非球面的偏离度越来越大。对这种大偏离度非球面进行亚纳米量级的检测,一直是光学检测的一大难题。本文首先对一偏离度超过500 μm的偶次高次非球面进行了计算全息图(Computer-Generated Hologram,CGH)设计,设计出了满足高精度面形检测和刻蚀加工要求的CGH。然后,针对此设计方案,定量分析了CGH的成像畸变及畸变对像差分析的影响。分析结果表明,不同径向位置的成像倍率偏差(畸变)最大达到了2.7:1,并且由于畸变的存在,低阶像差衍生出了明显的高阶像差。最后,针对用CGH检测大偏离度非球面时出现的成像畸变,提出了采用光线追迹与最小二乘法相结合的成像畸变的校正方法,并通过实验验证了此方法的准确性。实验结果表明,畸变校正之后相对剩余残差小于0.2%,可以满足高精度非球面检测加工的要求。

     

  • 图 1  非球面的偏离度和非球面梯度

    Figure 1.  Departure and slope of the asphere

    图 2  用CGH检测非球面的光路图和CGH刻线的空间频率

    Figure 2.  Light path of testing asphere with CGH and spatial frequency of CGH

    图 3  非球面与参考面上的Footprint

    Figure 3.  Footprint of asphere and reference surface

    图 4  非球面不同的径向位置在CCD上的分辨率

    Figure 4.  CCD resolution for the different radial positions of asphere

    图 5  非球面倾斜0.001度时,分别以非球面和参考面为光阑,仿真获得的干涉图与Zernike系数;(a)以非球面为光阑时的干涉图;(b)以参考面为光阑时的干涉图;(c)以非球面为光阑时的Zernike系数;(d)以参考面为光阑时的Zernike系数

    Figure 5.  Interferograms and Zernike coefficients generated by simulation when the asphere and reference surface are set as stop respectively, and the tilt of asphere is set 0.001 degree; (a) Interferogram when the asphere is set as stop. (b) Interferogram when the reference surface is set as stop. (c) Zernike coefficients when the asphere is set as stop. (d) Zernike coefficients when the reference surface is set as stop

    图 6  采用不同的拟合阶数进行拟合时的剩余残差

    Figure 6.  Fitting residuals when using different fitting orders

    图 7  (a)带有标记点的干涉图;(b)在干涉图中提取标记点坐标

    Figure 7.  (a) Interferogram with fiducials; (b) Extracting the coordinates of fiducials on the interferogram

    图 8  CGH的实物图

    Figure 8.  Image of CGH

    图 9  (a)畸变校正之前的干涉图;(b)畸变校正之后的干涉图

    Figure 9.  (a) Interferogram before correcting distortion; (b) Interferogram after correcting distortion

    图 10  畸变校正的相对残差

    Figure 10.  Relative residual of distortion correction

    图 11  非球面检测结果

    Figure 11.  Testing result of asphere

    表  1  非球面参数

    Table  1.   Parameters of asphere

    DRKA4A6A8
    144297.5100-1.363×10-76.488×10-12-7.002×10-16
    A10A12A14A16A18
    4.057×10-19-1.505×10-223.533×10-26-4.479×10-302.358×10-34
    下载: 导出CSV
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出版历程
  • 收稿日期:  2017-01-13
  • 修回日期:  2017-02-24
  • 刊出日期:  2017-06-01

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