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光学元件狭缝柔性调节机构的设计与分析

董世则 郭抗 李显凌 陈华男 张德福

董世则, 郭抗, 李显凌, 陈华男, 张德福. 光学元件狭缝柔性调节机构的设计与分析[J]. 中国光学, 2017, 10(6): 790-797. doi: 10.3788/CO.20171006.0790
引用本文: 董世则, 郭抗, 李显凌, 陈华男, 张德福. 光学元件狭缝柔性调节机构的设计与分析[J]. 中国光学, 2017, 10(6): 790-797. doi: 10.3788/CO.20171006.0790
DONG Shi-ze, GUO Kang, LI Xian-ling, CHEN Hua-nan, ZHANG De-fu. Design and analysis of adjustment mechanism with slit diaphragm flexures for optical elements[J]. Chinese Optics, 2017, 10(6): 790-797. doi: 10.3788/CO.20171006.0790
Citation: DONG Shi-ze, GUO Kang, LI Xian-ling, CHEN Hua-nan, ZHANG De-fu. Design and analysis of adjustment mechanism with slit diaphragm flexures for optical elements[J]. Chinese Optics, 2017, 10(6): 790-797. doi: 10.3788/CO.20171006.0790

光学元件狭缝柔性调节机构的设计与分析

doi: 10.3788/CO.20171006.0790
基金项目: 

国家科技重大专项(02专项)资助项目 2009ZX02205

国家自然科学基金资助项目 61504142

详细信息
    作者简介:

    董世则(1991-), 男, 河南濮阳人, 硕士研究生, 主要从事光学精密仪器结构设计及微位移方面的研究。E-mail:dongshize14@mails.ucas.ac.cn

    李显凌(1974—),男,辽宁沈阳人,副研究员,主要从事精密机械及精密光学仪器结构等方面的研究

    通讯作者:

    李显凌, E-mail:lixianling@sklao.ac.cn

  • 中图分类号: TH701;TH703

Design and analysis of adjustment mechanism with slit diaphragm flexures for optical elements

Funds: 

National Science and Technology Major Project of China 2009ZX02205

National Natural Science Foundation of China 61504142

More Information
  • 摘要: 设计了一种狭缝柔性结构的光学元件调节机构,使光学元件在具备较高调节精度的同时,保持较高的导向精度。采用弹性力学应力函数法分析了狭缝柔性结构的刚度,以径向刚度与轴向刚度的比值为目标函数,对狭缝柔性结构尺寸参数进行了优化,在不超过柔性结构材料屈服应力等约束条件下,刚度比最优值达到1 573.6,较大的刚度比值可以减小调节机构的耦合位移,从而提高机构的导向精度。该结构加工装配方便,可实现三自由度(θx-θy-Z)调节。对优化后的柔性结构进行仿真分析,结果表明:径向刚度与轴向刚度比值的仿真值为1 660.4,解析值与仿真值误差为5.23%,证明了刚度分析方法的有效性。优化后的结构,轴向调节行程为2.09 mm,绕x轴偏转角度调节行程为±16.6 mrad,绕y轴偏转角度调节行程可达到±14.4 mrad,满足光学元件调节的大行程要求。
  • 图  1  柔性调节机构示意图

    Figure  1.  Structure schematic diagram of the flexible mechanism

    图  2  驱动器分布示意图

    Figure  2.  Sketch of evenly distributed actuators

    图  3  两端固支圆弧形梁

    Figure  3.  Curved beam with fixed ends

    图  4  驱动力与轴向位移关系

    Figure  4.  Force vs. the axial displacement

    图  5  驱动力与径向位移关系

    Figure  5.  Force vs. the radial displacement

    图  6  狭缝柔性结构轴向位移变形云图

    Figure  6.  Axial deformation of the slit diaphragm flexures

    图  7  狭缝柔性结构Von Mises应力云图

    Figure  7.  Von Mises stress of the slit diaphragm flexures

    图  8  狭缝柔性结构绕X轴偏转调节变形云图

    Figure  8.  Angle deformation of the slit diaphragm flexures around on X axis

    图  9  狭缝柔性结构绕Y轴偏转调节变形云图

    Figure  9.  Angle deformation of the slit diaphragm flexures around on Y axis

    表  1  最优化参数值

    Table  1.   Value of optimized parameters

    b/mm h/mm d/mm rf/mm α/(°) maxf(X)
    13 1.25 1 139.5 16 1 573.6
    下载: 导出CSV

    表  2  狭缝柔性结构性能参数解析值与仿真值比照

    Table  2.   Comparison between performance parameters of the slit diaphragm flexures and simulation valves

    The axial stiffness/(N·mm-1) The radial stiffness/(N·mm-1) The stiffness ratio
    The theoretical value 14.61 2 2996 1 573.6
    The simulation value 14.34 23 809 1 660.4
    The relative tolerance(%) 1.92 3.41 5.23
    下载: 导出CSV
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出版历程
  • 收稿日期:  2017-06-11
  • 修回日期:  2017-08-13
  • 刊出日期:  2017-12-01

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