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小型掠入射式近边X射线吸收谱仪的设计

陈晨曦阳 金春水 王君 谢耀

陈晨曦阳, 金春水, 王君, 谢耀. 小型掠入射式近边X射线吸收谱仪的设计[J]. 中国光学, 2018, 11(2): 265-278. doi: 10.3788/CO.20181102.0265
引用本文: 陈晨曦阳, 金春水, 王君, 谢耀. 小型掠入射式近边X射线吸收谱仪的设计[J]. 中国光学, 2018, 11(2): 265-278. doi: 10.3788/CO.20181102.0265
CHEN Chen-xi-yang, JIN Chun-shui, WANG Jun, XIE Yao. Design of a compact spectrometer under grazing incidence conditions for near-edge X-ray absorption spectroscopy[J]. Chinese Optics, 2018, 11(2): 265-278. doi: 10.3788/CO.20181102.0265
Citation: CHEN Chen-xi-yang, JIN Chun-shui, WANG Jun, XIE Yao. Design of a compact spectrometer under grazing incidence conditions for near-edge X-ray absorption spectroscopy[J]. Chinese Optics, 2018, 11(2): 265-278. doi: 10.3788/CO.20181102.0265

小型掠入射式近边X射线吸收谱仪的设计

doi: 10.3788/CO.20181102.0265
详细信息
    作者简介:

    陈晨曦阳(1991-), 男, 江苏南通人, 硕士研究生, 主要从事X射线吸收谱仪方面的研究。E-mail:chenchenxiyang@163.com

    金春水(1964—),男,吉林长春人,博士,研究员,博士生导师,主要从事紫外极紫外光学技术方面的研究。E-mail:Jincs@sklao.ac.cn

  • 中图分类号: O434.13

Design of a compact spectrometer under grazing incidence conditions for near-edge X-ray absorption spectroscopy

More Information
    Author Bio:

    CHEN Chen-xi-yang(1991—):male, born in Nantong, Jiangsu; master degree candidate; engaged mainly in the study of X-ray absorption spectrometers. E-mail:chenchenxiyang@163.com

    JIN Chun-shui(1964—), male, born in Changchun, Jilin; doctor, researcher; engaged mainly in the study of UV and EUV optical technologies. E-mail:Jincs@sklao.ac.cn

    Corresponding author: JIN Chun-shui, E-mail:Jincs@sklao.ac.cn
  • 摘要: 近边X射线吸收精细结构(NEXAFS)谱包含了吸收原子的局域结构信息,由于其适用范围广,灵敏度高,已经成为研究物质结构的重要手段之一。为了研究有机物的碳1s NEXAFS谱,本文基于气体激光等离子体X射线光源,采用具有平场特性的凹面变线距光栅作为分光元件,面阵CCD作为光谱探测器,设计了一台小型掠入射式近边X射线吸收谱仪。通过优化光栅和CCD的装配方案,得到了入射角88.6°的装配参数。利用光线追迹法分析了谱仪的分辨率,该谱仪工作波段2~5 nm,在4.4 nm处分辨率可达666。通过分析各结构参量误差对谱线半高宽的影响发现,半高宽对入射角的误差最为敏感,优化的装配方案可以实现入射角的高精度调节。利用氮气等离子体光谱测试了光谱仪的性能,结果显示分辨率达到设计指标。
  • 图  1  掠入射式X射线吸收谱仪示意图

    Figure  1.  Sketch of the designed X-ray absorption spectrometer under grazing incidence conditions

    图  2  反射率随掠入射角的变化

    Figure  2.  Reflectivity as a function of grazing incidence angle

    图  3  变栅距凹面光栅原理图

    Figure  3.  Schematic diagram of the aberration corrected flat-field grating

    图  4  不同入射角对应的聚焦曲线,红线表示聚焦曲线,黑色虚线表示其拟合直线,绿线表示不同波长

    Figure  4.  Focusing curves and fitting straight lines at different incidence angles. The red lines represent the focus curves, the black dashed lines are straight fitting lines and the green lines are different wavelengths

    图  5  光栅的不同使用结构

    Figure  5.  Structures of the grating (a)the conventional scheme, (b)the optimized scheme

    图  6  4.4 nm波长的光线追迹结果

    Figure  6.  The result of ray tracing at 4.4 nm (a)Spot diagram, (b)Histogram, (c)Gauss fitting curve

    图  7  各参数(rDθα)的误差对4.4 nm单色谱线的半高宽的影响

    Figure  7.  Influence of the error of each parameter on the FWHM at 4.4 nm (a)r, (b)D, (c)θ, (d)α

    图  8  光谱仪实物图

    Figure  8.  Picture of the spectrometer

    图  9  氮气等离子体谱线

    Figure  9.  Spectrum of N2 plasma

    表  1  优化的装配方案参数

    Table  1.   Parameters of the optimized installation scheme

    Parameters α/(°) r/mm D/mm θ/(°)
    Value 88.6 270 234.0 91.4
    下载: 导出CSV

    表  2  掠入射式近边X射线吸收谱仪设计参数

    Table  2.   Design parameters of the Near-edge X-ray absorption spectrometer under grazing incidence conditions

    Parameters Value
    Wavelength range/nm 2~5
    Resolution 666@4.4 nm
    φ/(°) 2
    Width of entrance slit S1/μm 100
    n0/mm-1 2 400
    Incidence angle α/(°) 88.6
    Incidence distance r/mm 270
    θ/(°) 91.4
    D/mm 234.0
    Pixel size(W×H:μm2) 13.5×13.5
    Active pixels 1 024×1 024
    下载: 导出CSV

    表  3  波长标定结果

    Table  3.   Results of wavelength calibration

    Pixel positions 1 631 777 782 821 841 1 024
    Actural wavelength/nm 2.878 7 2.489 8 2.478 1 2.377 4 2.327 7
    Calibration wavelength/nm 5.025 2.878 1 2.490 2 2.477 5 2.378 2 2.328 1 2.008 3
    Error/nm -0.000 6 0.000 4 -0.000 5 0.000 8 0.000 4
    下载: 导出CSV

    表  4  光学系统参数设计值与实际值比较

    Table  4.   Comparison of the design value with the actual value of optical system parameters

    Parameters α/(°) θ/(°) D0/mm x0/mm
    Design value 88.6 91.4 234 23.74
    Actual value 88.634 8 91.389 9 234.011 3 23.682 6
    下载: 导出CSV
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出版历程
  • 收稿日期:  2017-10-15
  • 修回日期:  2017-11-28
  • 刊出日期:  2018-04-01

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