Influence of temperature variation on polarization characteristics of silver thin film mirror
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摘要: 空间遥感应用中的光学有效载荷对系统偏振控制提出了越来越高的要求，作为常用的宽光谱反射镜，金属银(Ag)膜反射镜的偏振特性随着环境温度的改变而变化。本文设计并制备了低偏振灵敏度的Ag膜反射镜，研究了反射镜在45°和60°入射角下，从室温25℃升温到150℃时的偏振特性变化和反射光谱变化情况。随着温度的升高，Ag膜的折射率在350~1 200 nm波长范围内有所增加；Ag膜反射镜的反射光中s和p光的相位差Δ在350~600 nm波长范围内减小，在600~650 nm波长范围内基本稳定，在650~1 200 nm波长范围内增大。温度上升到125℃时，Ag膜和反射镜表面形貌发生改变，增加了表面散射和吸收，导致350~900 nm波段反射率降低，在波长350 nm附近的降低约25%。Abstract: Optical payloads in space remote sensing applications impose increasingly high requirements on system polarization control. As a wide spectral reflector, the polarization characteristics of silver thin film mirror usually changes with the ambient temperature. In this paper, silver thin film mirrors with low polarization sensitivity are designed and fabricated. The changes of polarization characteristics and reflection spectrum of the mirrors with room temperature from 25℃ to 150℃ are investigated at 45° and 60° incident angles. The refractive index of silver thin film increases in spectral range of 350 nm to 1 200 nm with the increase of temperature. The phase difference Δ between the s and p light in the reflected light of the silver film mirror is reduced in the wavelength range of 350 to 600 nm, keep stable in 600-650 nm, and increases in the wavelength range of 650 to 1 200 nm. The surface morphology of the silver film and mirror changes, and the surface scattering and absorption increases when temperature reaches 125℃, resulting in a decrease in reflectivity in the 350-900 nm band and even a decrease of about 25% in the wavelength of 350 nm.
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Key words:
- Ag thin film /
- mirrors /
- temperature variation /
- polarization characteristics /
- reflectance
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图 1 椭圆偏振仪温控测量原理图
Figure 1. Schematic diagram of temperature control measurement for ellipsometer
图 2 不同温度Ag膜反射镜45°入射椭偏光谱
Figure 2. Spectral curves of elliptical polarization parameters of the Ag thin film mirror at different temperatures and 45° incidence
图 3 不同温度Ag膜反射镜60°入射椭偏光谱
Figure 3. Spectral curves of elliptical polarization parameters of the Ag thin film mirror at different temperatures and 60° incidence
图 4 加热试验前后Ag膜反射镜45°椭偏光谱
Figure 4. Spectral curves of elliptical polarization parameters of the Ag film mirror at 25 ℃ and 45° incidence before and after 150 ℃ heating
图 5 不同温度下Ag膜的折射率光谱曲线
Figure 5. Spectral curves of the refractive index of single silver thin film at different temperature
图 6 Ag膜在25 ℃和150 ℃温度下的反射光谱
Figure 6. Reflective spectrum of silver thin film at 25 ℃ and 150 ℃ temperature
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[1] PHILLIPS A C, KOBAYASHI N P. Moisture barrier and chemical corrosion protection of silver-based telescope mirrors using aluminum oxide films by plasma-enhanced atomic layer deposition[J]. Proc. of SPIE, 2013, 8820:88200Y. doi: 10.1117/12.2023826 [2] 孙梦至, 王彤彤, 王延超, 等.大口径反射镜高反射膜研究进展[J].中国光学, 2016, 9(2):203-212. http://www.chineseoptics.net.cn/CN/abstract/abstract9405.shtmlSUN M Z, WANG T T, WANG Y C, et al.. Research development of high reflecting coating for large-diameter mirror[J].Chinese Optics, 2016, 9(2):203-212. http://www.chineseoptics.net.cn/CN/abstract/abstract9405.shtml [3] FELLER A, KRISHNAPPA N, SCH RMANN M. Reflectivity, polarization properties, and durability of metallic mirror coatings for the European Solar Telescope[J]. Proc. of SPIE, 2012, 8450:84503U-11. doi: 10.1117/12.927080 [4] PHILLIPS A C, COWLEY D J. Progress toward high-performance astronomical coatings[J]. Proc. of SPIE, 2010, 7739:77393Y. doi: 10.1117/12.856499 [5] BURGE D K, BENNETT H E, ASHLEY E J. Effect of atmospheric exposure on the infrared reflectance of silvered mirrors with and without protective coatings[J]. Appl. Opt., 1973, 12(1):42-47. doi: 10.1364/AO.12.000042 [6] DOHRING T, PROBST A C, STOLLENWERK M, et al.. Development of low-stress Iridium coatings for astronomical x-ray mirrors[J]. Proc. of SPIE, 2016, 9905:99056S. http://adsabs.harvard.edu/abs/2016SPIE.9905E..6VD [7] SCHURMANN M, JOBST P J, STENZEL O, et al.. High-reflective coatings for ground and space based applications[J]. Proc. of SPIE, 2017, 10563:105630M. [8] ROTHEN A. The ellipsometer, an apparatus to measure thicknesses of thin surface films[J]. Review of Scientific Instruments, 1945, 16(2):26-30. doi: 10.1063/1.1770315 [9] 廖延彪.偏振光学[M].北京:科学出版社, 2003.LIAO Y B. Polarization of Optics[M]. Beijing:Science Press, 2003.(in Chinese) [10] 刘晓伟, 郭会斌, 李梁梁, 等.磁控溅射成膜温度对纯铝薄膜小丘生长以及薄膜晶体管阵列工艺良率的影响[J].液晶与显示, 2014, 29(4):548-552. http://www.docin.com/p-520405460.htmlLIU X W, GAO H B, LI L L, et al.. Effect of sputter temperature on hillock formation in pure Al film and thin film transistor array process yield[J]. Chines Journal of Liquid Crystals and Displays, 2014, 29(4):548-552.(in Chinese) http://www.docin.com/p-520405460.html [11] 李刚, 孙连春, 于兆波, 等.光学薄膜中的偏振效应[J].光学 精密工程, 2003, 11(6):647-651. http://www.opticsjournal.net/Articles/Abstract?aid=OJ061103000611KhNjQmLI G, SUN L CH, YU ZH B, et al.. Polarization effects in optical thin films[J]. Opt. Precision Eng., 2003, 11(6):647-651.(in Chinese) http://www.opticsjournal.net/Articles/Abstract?aid=OJ061103000611KhNjQm [12] 高丽丽, 徐莹, 张淼, 等.Mg含量对MgZnO薄膜光学性质的影响[J].液晶与显示, 2014, 29(3):350-354. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yjyxs201403008GAO L L, XU Y, ZHANG M, et al.. Effects of Mg content on the optical properties of Mg ZnO films[J]. Chines Journal of Liquid Crystals and Displays, 2014, 29(3):350-354. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yjyxs201403008 [13] 汤凯, 程志恩, 张海峰, 等.镀金属膜与非镀膜角锥棱镜远场衍射性能与测试[J].光学 精密工程, 2016, 24(10):353-360. https://patents.google.com/patent/CN101067546A/zhTANG K, CHENG ZH E, ZHANG H F, et al.. Far field diffraction performance and testing for metal-coated and uncoated cube corner prism[J]. Opt. Precision Eng., 2016, 24(10):353-360.(in Chinese) https://patents.google.com/patent/CN101067546A/zh [14] MINAMITANI R. Corrosion rate for silver exposed to indoor atmosphere[J]. Corrosion Engineering, 2015, 64(1):14-19. doi: 10.3323/jcorr.64.14 [15] ECHANIZ T, PEREZ-SAEZ R B, TELLO M J. Optical properties of metals:infrared emissivity in the anomalous skin effect spectral region[J]. Journal of Applied Physics, 2014, 116(9):6-118. https://www.osti.gov/scitech/biblio/22314375 -
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