一种自适应安装的高精度图像式角位移测量装置

于海; 万秋华; 孙莹; 卢新然; 贾兴丹

doi:10.3788/CO.2019-0107

一种自适应安装的高精度图像式角位移测量装置

doi: 10.3788/CO.2019-0107

于海^1, ,,
万秋华¹,
孙莹¹,
卢新然¹,
贾兴丹^{1, 2}

1.
中国科学院长春光学精密机械与物理研究所，吉林长春 130033
2.
中国科学院大学，北京 100049

基金项目: 国家自然科学基金资助项目（No. 51605465）；吉林省科技发展计划资助项目（No. 20180520184JH）

详细信息

作者简介:
于　海（1987—），男，吉林敦化人，副研究员，2009年于东北电力大学获得学士学位，2014年于中国科学院长春光学精密机械与物理研究所机械电子工程专业获得工学博士学位，目前主要从事光电位移精密测量技术的研究。E-mail: yuhai@ciomp.ac.cn

通讯作者:
E-mail：yuhai@ciomp.ac.cn

中图分类号: TP212
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出版历程
- 收稿日期: 2019-05-17
- 修回日期: 2019-07-16
- 刊出日期: 2020-06-01

A high precision image angular displacement measurement device with self-adaptive installation

YU Hai^{1
, ,},
WAN Qiu-hua¹,
SUN Ying¹,
LU Xin-ran¹,
JIA Xing-dan^{1, 2}

1.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2.
University of Chinese Academy of Sciences, Beijing 100049, China

Funds: Supported by National Natural Science Foundation of China (No. 51605465); Science and Technology Development Programme of Jilin Province (No. 20180520184JH)

More Information

Corresponding author: yuhai@ciomp.ac.cn

摘要

摘要: 采用图像探测器的角位移测量技术可实现高精度高分辨力角位移测量。为提高角位移测量装置的鲁棒性，本文设计了一种自适应安装的高精度图像式角位移测量装置。其装调过程非常简便，且可以保证在标定光栅存在偏心时具有高分辨力和高精度测量输出。首先，提出了基于双线阵图像传感器的测角装置设计原理，并设计了单圈绝对式标定光栅。然后，采用基于质心算法的高分辨力细分算法进行细分，并采用双线阵图像传感器对测角误差进行误差补偿。最后，设计实验装置测试自适应安装的性能。实验结果表明，当标定光栅的偏心度在±1 mm以内时，所设计装置可以实现高精度和高分辨力的角位移测量。本文所设计的装置可以在标定光栅存在±1 mm的安装偏心时保证输出精度，为小型角位移测量装置适应性的提高给出了解决方案。
- 角位移测量 /
- 误差补偿 /
- 双图像探测器 /
- 自适应安装
Abstract: The angular displacement measurement technology based on image detector is a hot research to realize high-precision and high-resolution angular displacement measurement. In order to improve the robustness of the angular displacement measuring devices, a high precision image displacement measurement device with self-adaptive installation techniques is designed in this paper. The installation and adjustment processes are very simple, and high resolution and high precision measurement output can be guaranteed in the presence of eccentricity in the calibration grating. Firstly, the angle measurement device using dual linear imaging sensors is proposed and a single-ring absolute grating is designed. Then, a high-resolution subdivision algorithm based on a centroid algorithm is used to subdivide the image, and dual linear image sensors are used to compensate for the angle measurement error. Finally, an experimental device is designed to test the performance of the adaptive installation. Experiments show that when the eccentricity of the grating is within ±1 mm, the designed device can achieve highly precise angular displacement measurements with high resolution. The device designed in this paper guarantee the output accuracy when the grating has an installation eccentricity of ±1 mm, which lays a foundation for improving the adaptability of small angular displacement measuring devices.
- angular displacement measurement /
- error compensation /
- dual image sensors /
- self-adaptive installation

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图 1 测量光路原理图

Figure 1. Principle diagram of measuring optical path

下载: 全尺寸图片幻灯片

图 2 单圈编码原理图

Figure 2. Coding principle of single ring

下载: 全尺寸图片幻灯片

图 3 角位移细分原理

Figure 3. Angle subdivision principle

下载: 全尺寸图片幻灯片

图 4 图像传感器安装位置原理图

Figure 4. Principle diagram of image sensor installation position

下载: 全尺寸图片幻灯片

图 5 角位移测量装置

Figure 5. Angle measurement device

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图 6 文献[15]装置的分辨力检测曲线

Figure 6. Detection curve of the device in reference [15]

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图 7 精度测试原理

Figure 7. Principle of precision test

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图 8 单双图像传感器的误差对比

Figure 8. Comparison of measurement error by single- and dual- sensors

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图 9 实验装置的3次检测结果

Figure 9. Results of three tests on experimental equipment

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表 1 标定误差结果(″)

Table 1. Results of calibration error (″)

Angles/(°)	Errors	Angles/(°)	Errors	Angles/(°)	Errors
0	0	120	−28.1	240	−25.1
15	13.5	135	0.8	255	−2.1
30	6.9	150	−1.5	270	−11.2
45	−21.4	165	−2.0	285	12.3
60	−26.6	180	−6.1	300	−11.3
75	−17.2	195	5.6	315	16
90	−19.7	210	0.8	330	25.1
105	−12.2	225	−22	345	32.7

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参考文献(16)

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