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一种自适应安装的高精度图像式角位移测量装置

于海 万秋华 孙莹 卢新然 贾兴丹

于海, 万秋华, 孙莹, 卢新然, 贾兴丹. 一种自适应安装的高精度图像式角位移测量装置[J]. 中国光学, 2020, 13(3): 510-516. doi: 10.3788/CO.2019-0107
引用本文: 于海, 万秋华, 孙莹, 卢新然, 贾兴丹. 一种自适应安装的高精度图像式角位移测量装置[J]. 中国光学, 2020, 13(3): 510-516. doi: 10.3788/CO.2019-0107
YU Hai, WAN Qiu-hua, SUN Ying, LU Xin-ran, JIA Xing-dan. A high precision image angular displacement measurement device with self-adaptive installation[J]. Chinese Optics, 2020, 13(3): 510-516. doi: 10.3788/CO.2019-0107
Citation: YU Hai, WAN Qiu-hua, SUN Ying, LU Xin-ran, JIA Xing-dan. A high precision image angular displacement measurement device with self-adaptive installation[J]. Chinese Optics, 2020, 13(3): 510-516. doi: 10.3788/CO.2019-0107

一种自适应安装的高精度图像式角位移测量装置

doi: 10.3788/CO.2019-0107
基金项目: 国家自然科学基金资助项目(No. 51605465);吉林省科技发展计划资助项目(No. 20180520184JH)
详细信息
    作者简介:

    于海:于 海(1987—),男,吉林敦化人,副研究员,2009年于东北电力大学获得学士学位,2014年于中国科学院长春光学精密机械与物理研究所机械电子工程专业获得工学博士学位,目前主要从事光电位移精密测量技术的研究。E-mail: yuhai@ciomp.ac.cn

    通讯作者:

    E-mail:yuhai@ciomp.ac.cn

  • 中图分类号: TP212

A high precision image angular displacement measurement device with self-adaptive installation

Funds: Supported by National Natural Science Foundation of China (No. 51605465); Science and Technology Development Programme of Jilin Province (No. 20180520184JH)
More Information
  • 摘要: 采用图像探测器的角位移测量技术可实现高精度高分辨力角位移测量。为提高角位移测量装置的鲁棒性,本文设计了一种自适应安装的高精度图像式角位移测量装置。其装调过程非常简便,且可以保证在标定光栅存在偏心时具有高分辨力和高精度测量输出。首先,提出了基于双线阵图像传感器的测角装置设计原理,并设计了单圈绝对式标定光栅。然后,采用基于质心算法的高分辨力细分算法进行细分,并采用双线阵图像传感器对测角误差进行误差补偿。最后,设计实验装置测试自适应安装的性能。实验结果表明,当标定光栅的偏心度在±1 mm以内时,所设计装置可以实现高精度和高分辨力的角位移测量。本文所设计的装置可以在标定光栅存在±1 mm的安装偏心时保证输出精度,为小型角位移测量装置适应性的提高给出了解决方案。
  • 图  1  测量光路原理图

    Figure  1.  Principle diagram of measuring optical path

    图  2  单圈编码原理图

    Figure  2.  Coding principle of single ring

    图  3  角位移细分原理

    Figure  3.  Angle subdivision principle

    图  4  图像传感器安装位置原理图

    Figure  4.  Principle diagram of image sensor installation position

    图  5  角位移测量装置

    Figure  5.  Angle measurement device

    图  6  文献[15]装置的分辨力检测曲线

    Figure  6.  Detection curve of the device in reference [15]

    图  7  精度测试原理

    Figure  7.  Principle of precision test

    图  8  单双图像传感器的误差对比

    Figure  8.  Comparison of measurement error by single- and dual- sensors

    图  9  实验装置的3次检测结果

    Figure  9.  Results of three tests on experimental equipment

    表  1  标定误差结果(″)

    Table  1.   Results of calibration error (″)

    Angles/(°)ErrorsAngles/(°)ErrorsAngles/(°)Errors
    00120−28.1240−25.1
    1513.51350.8255−2.1
    306.9150−1.5270−11.2
    45−21.4165−2.028512.3
    60−26.6180−6.1300−11.3
    75−17.21955.631516
    90−19.72100.833025.1
    105−12.2225−2234532.7
    下载: 导出CSV
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出版历程
  • 收稿日期:  2019-05-17
  • 修回日期:  2019-07-16
  • 刊出日期:  2020-06-01

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