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Femtosecond pulsed laser induced damage characteristics on Si-based multi-layer film

ZHENG Chang-bin SHAO Jun-feng LI Xue-lei WANG Hua-long WANG Chun-rui CHEN Fei WANG Ting-feng GUO Jin

郑长彬, 邵俊峰, 李雪雷, 王化龙, 王春锐, 陈飞, 王挺峰, 郭劲. 飞秒脉冲激光对硅基多层膜损伤特性[J]. 中国光学(中英文), 2019, 12(2): 371-381. doi: 10.3788/CO.20191202.0371
引用本文: 郑长彬, 邵俊峰, 李雪雷, 王化龙, 王春锐, 陈飞, 王挺峰, 郭劲. 飞秒脉冲激光对硅基多层膜损伤特性[J]. 中国光学(中英文), 2019, 12(2): 371-381. doi: 10.3788/CO.20191202.0371
ZHENG Chang-bin, SHAO Jun-feng, LI Xue-lei, WANG Hua-long, WANG Chun-rui, CHEN Fei, WANG Ting-feng, GUO Jin. Femtosecond pulsed laser induced damage characteristics on Si-based multi-layer film[J]. Chinese Optics, 2019, 12(2): 371-381. doi: 10.3788/CO.20191202.0371
Citation: ZHENG Chang-bin, SHAO Jun-feng, LI Xue-lei, WANG Hua-long, WANG Chun-rui, CHEN Fei, WANG Ting-feng, GUO Jin. Femtosecond pulsed laser induced damage characteristics on Si-based multi-layer film[J]. Chinese Optics, 2019, 12(2): 371-381. doi: 10.3788/CO.20191202.0371

飞秒脉冲激光对硅基多层膜损伤特性

基金项目: 

激光与物质相互作用国家重点实验室自主基金课题 SKLLIM-1502

详细信息
    作者简介:

    郑长彬(1981—),男,黑龙江富锦人,博士,副研究员,2005年于吉林大学获得硕士学位,2011年于哈尔滨工业大学获得博士学位,主要从事激光辐照效应方面的研究。E-mail:zhengchangbin@ciomp.ac.cn

  • 中图分类号: TN249

Femtosecond pulsed laser induced damage characteristics on Si-based multi-layer film

doi: 10.3788/CO.20191202.0371
Funds: 

Fundamental Research Project of Chinese State Key Laboratory of Laser Interaction With Matter SKLLIM-1502

More Information
    Author Bio:

    ZHENG Changbin(1981—), male, Fujin, Heilongjiang, Ph.D., Associate Researcher, B.S. in physics, college of physics, Jilin Univeristy, 2001-2005; Ph.D in optics, deportment of physics, Harbin Institute of Technology, 2005-2011 is mainly engaged in research on the effects of laser irradiation. E-mail:zhengchangbin@ciomp.ac.cn

    Corresponding author: Chang-bin, E-mail:zhengchangbin@ciomp.ac.cnZHENG
  • 摘要: 为了明确超快激光损伤典型成像探测器膜层结构的物理机制,对飞秒脉冲激光辐照硅基多层膜的损伤特性,以及各种损伤效应对应的激光能量通量范围和阈值条件进行研究。利用波长为800 nm、脉冲宽度为100 fs的脉冲激光和金相显微镜研究了硅基多层膜在不同激光能量通量和不同脉冲累积下的损伤效应。在能量通量为1.01~24.7 J/cm2的激光单脉冲辐照下,激光作用区域可观察到氧化/无定形化、非热烧蚀和激光诱导等离子体烧蚀所引起的表面损伤,其损伤效应与激光能量通量有明显联系,激光作用区域尺寸随能量通量线性增大。在2.42 J/cm2到24.7 J/cm2激光能量通量范围内,可在辐照表面观察到激光诱导压力导致的多层损伤,损伤概率随激光能量通量的增加由1%增大到51%。在激光能量通量为1.01 J/cm2的连续多脉冲辐照下,烧蚀区域尺寸几乎不变,但烧蚀深度逐渐增加,其多层损伤机制为表面损伤的累积效应。通过单脉冲损伤实验数据拟合计算确定,飞秒激光诱导硅基多层膜表面损伤阈值为0.543 J/cm2,应力多层损伤阈值为2.16 J/cm2。低激光能量通量(≤ 1.01 J/cm2)多脉冲辐照累积作用同样可造成硅基多层膜深层损伤。

     

  • 图 1  硅基多层膜结构示意图

    Figure 1.  Sketch of structure for Si-based multi-layer film

    图 2  飞秒激光诱导损伤的实验装置示意图,图中包括格兰棱镜(G)、半波片(HWP)、分束镜(BS)、功率计(PM)、离轴抛面反射镜(L)、平移台(TS)和样品(S)

    Figure 2.  Schematic of femtosecond laser-induced damage experiment setup, including a Glan prism(G), a half wave plate(HWP), a beam splitting mirror(BS), a power meter(PM), an off-axis parabolic mirror(L), a translation stage(TS) and a sample(S)

    图 3  能量密度为(a)1.34 J/cm2和(b)11.6J/cm2的单脉冲激光辐照硅基多层膜显微图

    Figure 3.  Micrograph of Si-base multi-layer film irradiated by femtosecond single-pulse laser with energy densities of (a)1.34 J/cm2 and (b)11.6 J/cm2

    图 4  烧蚀区域尺寸随脉冲能量的变化规律

    Figure 4.  Laser ablated zone sizes vary with pulse fluence

    图 5  不同激光能量通量下应力损伤效果图

    Figure 5.  Stress-induced damage at different pulse fluences

    图 6  应力损伤概率随激光能量通量的变化规律

    Figure 6.  Stress-induced damage probability varies with pulse fluence

    图 7  低激光能量通量(1.01 J/cm2)连续烧蚀效果图像

    Figure 7.  Images of damage from continuous pulse ablation with fluence of 1.01 J/cm2

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出版历程
  • 收稿日期:  2018-01-23
  • 修回日期:  2018-03-20
  • 刊出日期:  2019-04-01

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