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Error analysis and fabrication of low-stepped mirrors

ZHANG Min LV Jin-guang LIANG Jing-qiu LIANG Zhong-zhu QIN Yu-xin WANG Wei-biao

张敏, 吕金光, 梁静秋, 梁中翥, 秦余欣, 王维彪. 低阶梯多级微反射镜高度误差分析及制作研究[J]. 中国光学(中英文), 2019, 12(4): 791-803. doi: 10.3788/CO.20191204.0791
引用本文: 张敏, 吕金光, 梁静秋, 梁中翥, 秦余欣, 王维彪. 低阶梯多级微反射镜高度误差分析及制作研究[J]. 中国光学(中英文), 2019, 12(4): 791-803. doi: 10.3788/CO.20191204.0791
ZHANG Min, LV Jin-guang, LIANG Jing-qiu, LIANG Zhong-zhu, QIN Yu-xin, WANG Wei-biao. Error analysis and fabrication of low-stepped mirrors[J]. Chinese Optics, 2019, 12(4): 791-803. doi: 10.3788/CO.20191204.0791
Citation: ZHANG Min, LV Jin-guang, LIANG Jing-qiu, LIANG Zhong-zhu, QIN Yu-xin, WANG Wei-biao. Error analysis and fabrication of low-stepped mirrors[J]. Chinese Optics, 2019, 12(4): 791-803. doi: 10.3788/CO.20191204.0791

低阶梯多级微反射镜高度误差分析及制作研究

基金项目: 

国家自然科学基金 61627819

国家自然科学基金 61575193

国家自然科学基金 61805239

国家自然科学基金 61727818

国家自然科学基金 61735018

吉林省科技发展计划 20190303063SF

吉林省科技发展计划 20180201024GX

吉林省科技发展计划 20150520101JH

吉林省科技发展计划 20170204077GX

中国科学院创新促进会基金 2018254

吉林省中青年科技创新团队项目 20190101012JH

详细信息
    作者简介:

    张敏(1989-), 女, 山东青岛人, 博士研究生, 主要从事微纳光学器件设计及制作、微光机电系统(MOEMS)等方面的研究。E-mail:83118376@163.com

    梁静秋(1962-), 女, 吉林长春人, 博士生导师, 主要从事微光机电系统(MOEMS)及红外成像光谱技术领域方面的研究。E-mail:liangjq@ciomp.ac.cn

    梁中翥(1978-), 男, 四川广安人, 博士生导师, 主要从事微光机电系统(MOEMS)及红外探测等方面的研究。E-mail:liangzz@ciomp.ac.cn

  • 中图分类号: TN214;O438.2;TN305.8

Error analysis and fabrication of low-stepped mirrors

doi: 10.3788/CO.20191204.0791
Funds: 

National Natural Science Foundation of China 61627819

National Natural Science Foundation of China 61575193

National Natural Science Foundation of China 61805239

National Natural Science Foundation of China 61727818

National Natural Science Foundation of China 61735018

Scientific and Technological Development Project of Jilin Province 20190303063SF

Scientific and Technological Development Project of Jilin Province 20180201024GX

Scientific and Technological Development Project of Jilin Province 20150520101JH

Scientific and Technological Development Project of Jilin Province 20170204077GX

Youth Innovation Promotion Association of the Chinese Academy of Sciences 2018254

Leading Talents and Team Project of Scientific and Technological Innovation for Young and Middle-aged Groups in Jilin Province 20190101012JH

More Information
  • 摘要: 本文提出了一种基于多级微反射镜和栅格分束器的静态轻型傅立叶红外变换光谱仪,通过两个多级微反射镜实现光程差的空间离散和干涉图的静态二维采样,通过引入栅格分束器有效降低了系统的体积和重量。作为该光谱仪的核心光学器件,多级微反射镜的阶梯高度一致性、面型平整度和结构精度是决定采样间隔、分辨率和噪声等仪器指标的主要因素。本文提出了基于MOEMS技术的厚度依次减半多层膜法,制作了台阶高度为0.625 μm,阶梯数为32的低阶梯多级微反射镜。测得实际阶梯高度平均值为626.9 nm,表面粗糙度均方根值为1.72 nm。分析了阶梯高度误差对光谱复原的影响,提出了两种阶梯高度误差校正方法,分别为通过修正因子来减小膜厚监控误差,和利用最小二乘余弦多项式算法对复原光谱进行校正。校正后的复原光谱误差(SCE)降低为2.34%,满足系统对光谱复原的要求。最后,将该低阶梯多级微反射镜置入光谱仪中,得到乙腈样品的干涉图和复原光谱图。

     

  • 图 1  静态轻型FTIR结构示意图

    Figure 1.  Schematic diagram of the static and light FTIR

    图 2  低阶梯多级微反射镜结构示意图

    Figure 2.  Schematic diagram of low-step multi-level micro-mirrors

    图 3  光谱评价函数SCE随阶梯高度标准差σ变化曲线

    Figure 3.  SCE varies with height standard deviation σ of the sub-mirror

    图 4  低阶梯多级微反射镜制备流程图(以8台阶为例)

    Figure 4.  Flow diagram of low-stepped multi-level micromirrors(with 8 steps as an example)

    图 5  低阶梯多级微反射镜照片

    Figure 5.  Low-step multi-level micro-mirrors

    图 6  局部低阶梯多级微反射镜放大图

    Figure 6.  Local detail of the low-step multi-level micro-mirrors

    图 7  低阶梯多级微反射镜粗糙度测试图

    Figure 7.  Roughness test chart of low-step multi-level micro-mirrors

    图 8  32级低阶梯多级微反射镜台阶高度测试图

    Figure 8.  Step height test results of low stepped micromirror with 32 steps

    图 9  台阶高度测试值与理论值差值图

    Figure 9.  Step height difference between the measured values and their theoretical values

    图 10  使用FFT算法时高度误差影响下的实际光谱和理想复原光谱对比图

    Figure 10.  Comparison of the ideal spectrum and the actual spectrum using the FFT algorithm with height error

    图 11  使用LSC算法时高度误差影响下的实际光谱和理想复原光谱对比图

    Figure 11.  Comparison of the ideal spectrum and the actual spectrum using the LSC algorithm with height error

    图 12  静态空间调制FTIR原理样机.1光源; 2准直系统; 3样品池; 4栅格分束板和栅格补偿板; 5高阶梯多级微反射镜; 6低阶梯多级微反射镜; 7缩束系统; 8红外探测器

    Figure 12.  Static spatial modulation FTIR prototype. 1 light source; 2 collimating system; 3 sample chamber; 4 beam splitter and compensation plate; 5 high-stepped micromirror; 6 low-stepped micromirror; 7.constricting system; 8 infrared detector array

    图 13  干涉图(a)加入样品前; (b)加入样品后

    Figure 13.  Interferogram (a)without the sample; (b) with the sample

    图 14  乙腈样品的复原光谱曲线

    Figure 14.  Recovered spectrum of acetonitrile

    表  1  Statistical test results of step height

    Table  1.   Statistical test results of step height

    Step Height Value
    Maximum value/ Highest positive deviation 640/15
    Minimum value/Lowest negative value 618/-7
    Average value/Average deviation 626.9/1.9
    Standard deviation 7.4
    下载: 导出CSV
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出版历程
  • 收稿日期:  2018-02-05
  • 修回日期:  2018-03-05
  • 刊出日期:  2019-08-01

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