平面天线在场效应晶体管太赫兹探测器中的应用

王晓东; 颜伟; 李兆峰; 张博文; 黄镇; 杨富华

doi:10.3788/CO.20201301.0001

平面天线在场效应晶体管太赫兹探测器中的应用

doi: 10.3788/CO.20201301.0001

王晓东^{1, 3,},
颜伟^1, ,,
李兆峰^{1, 2, 3,},
张博文^{1, 2},
黄镇^{1, 2, ,},
杨富华^{1, 2, 3, 4}

1.
中国科学院半导体研究所半导体集成技术工程研究中心, 北京 100083
2.
中国科学院大学材料与光电研究中心, 北京 100049
3.
中国科学院大学微电子学院, 北京 100049
4.
中国科学院半导体研究所超晶格国家重点实验室, 北京 100083

基金项目:

国家重点研发专项基金 No. 2016YFA02005003

国家自然科学基金 No. 61474115

详细信息

作者简介:
王晓东(1972-), 男, 山东莒县人, 研究员, 博士生导师, 中国科学院半导体所集成中心主任, 主要从事半导体微纳器件技术, 纳米热电结构与器件, 高效叠层太阳电池。E-mail:xdwang@semi.ac.cn

颜伟(1984—)，男，辽宁盘锦人，博士，助理研究员，主要从事集成平面天线GaN/AlGaN HEMT太赫兹探测器的研究。 E-mail:yanwei@semi.ac.cn

李兆峰(1976—)，男，江苏淮安人，研究员，硕士生导师，主要从事纳米光学与光电子学，特异材料，表面等离子体，光子晶体，微纳光学，太赫兹，MEMS器件等的研究。 E-mail:lizhaofeng@semi.ac.cn

黄镇(1993—)，男，湖北武汉人，博士研究生，主要从事集成平面天线GaN/AlGaN HEMT太赫兹探测器的研究。 E-mail:zhenhuang@semi.ac.cn

中图分类号: TN827+.2
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出版历程
- 收稿日期: 2019-04-11
- 修回日期: 2019-06-08
- 刊出日期: 2020-02-01

Application of planar antenna in field-effect transistor terahertz detectors

WANG Xiao-Dong^{1, 3
,},
YAN Wei^{1
, ,},
LI Zhao-feng^{1, 2, 3
,},
ZHANG Bo-wen^{1, 2},
HUANG Zhen^{1, 2
, ,},
YANG Fu-hua^{1, 2, 3, 4}

1.
Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2.
Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3.
School of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China
4.
State Key Laboratory of Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

Funds:

Supported by National Key Research and Development Fund No. 2016YFA02005003

Natural Science Foundation of China No. 61474115

More Information

Corresponding author: YAN Wei, E-mail:yanwei@semi.ac.cn; LI Zhao-feng E-mail:lizhaofeng@semi.ac.cn; HUANG Zhen E-mail:zhenhuang@semi.ac.cn

摘要

摘要: 为了提高场效应晶体管太赫兹探测器的响应度并降低噪声等效功率，需要对探测器集成平面天线的结构进行合理设计与优化，本文对集成平面天线结构的场效应晶体管太赫兹探测器的研究进行了深入调研。首先，对场效应晶体管太赫兹探测器的工作原理进行了分析，介绍了集成平面天线如何解决耦合太赫兹波效率低的问题。然后，介绍了一些常用的平面天线结构，包括偶极子天线、贴片天线、缝隙天线、grating-gate和其他类型的结构，比较了各种天线的性能以及引入后对太赫兹探测器响应度的影响。通过对比不同天线结构的探测器响应度和噪声等效功率等参数指标，发现：采用平面天线结构之后，场效应晶体管太赫兹探测器的响应度有了大幅度的提升，各种类型的天线对探测器响应度都有不同程度的提升。本文着重介绍了几种集成于场效应晶体管的平面天线结构，包括各种天线的性能和研究进展，最后分析了场效应晶体管太赫兹探测器存在的问题和发展趋势。
- 场效应晶体管太赫兹探测器 /
- 平面天线 /
- grating-gate结构 /
- 响应度 /
- 噪声等效功率
Abstract: In order to improve the responsivity and reduce the noise equivalent power of Field-Effect Transistor (FET) THz detectors, a suitable planar antenna structure is necessary.In this paper, we investigate the research progress of FET THz detectors integrated with planar antenna structures. Firstly, we analyze the working principle of FET THz detectors and clarify that an integrated planar antenna could effectively improve the detector's performance by enhancing its coupling efficiency with terahertz waves. Secondly, we present some typical planar antennas and discuss their pros and cons. These include the dipole antenna, the patch antenna, the slot antenna, the grating-gate, and others, which are each compared with respect to responsivity for the detectors. Finally, we find that the responsivity of the FET THz detectors can be greatly improved when applying planar antenna structure and that each type of antennas contributes uniquely. This work introduces several planar antennas integrated into FET THz detectors, including the performance and research progress of various antennas.Some existing problems are described and some predictions of the future development trends for this technology are summarized.
- FET THz detectors /
- planar antenna /
- grating-gate /
- responsivity /
- noise equivalent power

HTML全文

图 1 场效应晶体管太赫兹探测器结构示意图

Figure 1. Schematic diagram of FET terahertz detector

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图 2 接收天线的等效电路图

Figure 2. Equivalent circuit diagram of the receiving antenna

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图 3 自混频探测理论示意图(图片引自文献[19]，AIP已授权)

Figure 3. Schematic of self-mixing theory(reproduced from ref.[19], with the permission of AIP publishing)

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图 4 蝶形天线结构

Figure 4. Bow-tie antenna

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图 5 螺旋形天线结构

Figure 5. Spiral antenna

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图 6 对数周期天线结构

Figure 6. Log-periodic antenna

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图 7 缝隙天线结构

Figure 7. Slot antenna

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图 8 贴片天线结构

Figure 8. Patch antenna

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图 9 Grating-gate结构

Figure 9. Grating-gate structure

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