激光微熔覆技术的发展及应用

蔡志祥; 曾晓雁

激光微熔覆技术的发展及应用

华中科技大学光电子科学与工程学院武汉光电国家实验室(筹) 激光部,湖北武汉 430074

基金项目:

国家863高技术研究发展计划资助项目(No.2007AA030114)

详细信息

作者简介:
蔡志祥(1980—),男,江苏盐城人,讲师,主要从事激光微纳制造技术方面的研究。E-mail: caizhix@gmail.com

中图分类号: TG156.99
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出版历程
- 收稿日期: 2010-03-11
- 修回日期: 2010-05-13
- 刊出日期: 2010-10-25

Development and applications of laser micro cladding

Laser Division,Wuhan National Laboratory of Optoelectronics,School of Optoelectronics Science and Engineering,Huazhong University of Science and Technology,Wuhan 430074,China

摘要

摘要: 基于激光的直写技术具有加工周期短、使用灵活、无需掩模、环境要求低等诸多优点,其在微电子等领域应用广泛。本文引入了一种新的激光直写技术激光微熔覆技术,介绍了该技术的工艺过程及特点,并在此基础上集成制造了激光微熔覆设备。通过激光与物质的相互作用原理,理论分析了激光微熔覆电子浆料的成型机理。最后,举例说明该技术在微电子、光电子以及传感器领域的应用,并对该技术的发展趋势进行了初步预测,认为该技术在混合集成电路基板的加工、微型传感器和加热器的制造、平面无源电子器件和分立无源电子器件的研制以及生物芯片、电子封装等领域有好的发展前景。
- 激光微熔覆 /
- 直写技术 /
- 电子浆料
Abstract: Laser-based direct-writing techniques have gained increased interests in the microelectronic industry, which have some outstanding advantages such as short processing cycles, strong flexibility, no mask, and low environmental requirements. A new technology called laser micro-cladding technology was presented in this paper and the principles and characteristics of the technology were described in detail. On the basis of above researches, the equipment for laser micro cladding was assembled, then by studying the principle of interaction between laser and matter, the formation mechanism of laser micro cladding electronic pastes was analyzed. Finally, the applications of the technology to micro-electronic, optoelectronic and sensor areas were illustrated. Moreover, the development of this technology was predicted, and it was pointed out that the technology will show good prospects in fields of hybrid integrated circuit substrates, micro-sensors, micro-heaters, plane passive electronic devices, discrete devices, biochip and electronic packages.
- laser micro-cladding /
- direct-writing technology /
- electronic paste

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参考文献(1)

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