基于光学设计软件的相移点衍射干涉仪建模

张海涛

基于光学设计软件的相移点衍射干涉仪建模

张海涛

中国科学院长春光学精密机械与物理研究所,吉林长春 130033

基金项目:

国家重大科技专项

详细信息

作者简介:
张海涛(1987—),男,山东荷泽人,硕士,研究实习员,主要从事光学检测方面的研究。 E-mail:heisencheung@gmail.com

中图分类号: O436.1; TH744.3
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出版历程
- 收稿日期: 2010-05-09
- 修回日期: 2010-07-15
- 刊出日期: 2010-12-20

Modeling for phase shifting point diffraction interferometer based on lens design software

ZHANG Hai-Tao

Changchun Institute of Optics,Fine Mechanics and Physics, Chinese Academy of Sciences,Changchun 130033,China

摘要

摘要: 为了模拟用于球面面形高精度检测的相移点衍射干涉仪的测试过程,介绍了点衍射干涉仪的基本工作原理,分析了相移点衍射干涉仪的测量误差。利用光学设计软件和自行编制的软件建立了点衍射干涉仪的检测模型,利用该模型分别推导了参考光束和测试光束在干涉场的复振幅分布,模拟了测量过程。根据光的相干理论,通过改变被测镜的位置,实现移相,得到移相干涉图。最后对一设定的被检镜进行实验模拟,生成了两组对称倾斜的13步移相干涉图,对干涉图处理后计算得到了被检镜的检测面形。结果表明,在不引入硬件误差时,由相位提取和波面反演造成的检测面形与设定面形偏差为RMS值0.0783 nm,PV值0.5656 nm。
- 点衍射干涉仪 /
- 相移干涉图 /
- 建模 /
- 光学测量
Abstract: To simulate the testing procedure of a Phase Shifting Point Diffraction Interferometer(PSPDI), the working principle of the PSPDI was introduced and its measuring errors were analyzed. On the basis of the lens design software and a inhome software, a test model for the PSPDI was established. By using the test model, the complex amplitudes of the reference beam and test beam were captured in an interference field, furthermore, the testing procedure was simulated. Depending on the optical coherent theory, the phase shifting was realized by changing the positions of testing mirror, and the phase shifting interferograms were acquired. Finally, for a given mirror, the model was used to generate two groups of 13-step phase intergrams with a symmetrical tilt. After processing the interferograms, it is shown that the accuracies of testing spherical mirror are 0.0783 nm(RMS) and 0.5656 nm(PV).
- point diffraction interferometer /
- phase shifting interferogram /
- modeling /
- optical measurement

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参考文献(1)

[1] SMARTT R N,STRONG J. Point-diffraction interferometer[J]. J. Opt. Soc. Amer,1972,62:734-737. [2] KADONO H,TAKAI N,ASAKURA T. New common-path phase shifting interferometer using a polarization technique[J]. Appl. Opt.,1987,26(5):898-904. [3] NEAL M J. Polarization phase-shifting point-diffraction interferometry for measure extreme ultraviolet optics[J]. OSA Trends Opt. Photonics,1999,4:108-112. [4] 刘国淦,张学军,王权陡,等. 光纤点衍射干涉仪的技术研究[J]. 光学精密工程 , 2001,9(2):142-145. LIU G G,ZHANG X J,WANG Q D,et al.. Fiber point diffraction interferometer[J]. Opt. Precision Eng.,2001,9(2):142-145.(in Chinese) [5] CHEN L F,NIE L,ZHOU T G,et al.. Research on the fiber point diffraction interferometer for spherical figure measurement[J]. SPIE,2008,6357:63574J. [6] 李艳秋,刘克. 相移点衍射干涉仪的关键技术研究[J]. 激光与光电子学进展 ,2010,47(1):011201. LI Y Q,LIU K. Core techniques of phase-shifting point diffraction interferometer[J]. Laser Optoelectronics Progress,2010,47(1):011201.(in Chinese) [7] STONE B D. Modeling interferometers with lens design software[J]. Opt. Eng.,2000,39(7):1748-1759. [8] STONE B,THOMPSON K P. Modeling interferometers with lens design software:beyond ray-based approaches[J]. SPIE,2009,7427:74270A. [9] GONG Q,GEARY J M. Modeling point diffraction interferometers[J]. Opt. Eng.,1996,35(2) 351-356. [10] OTAKI K,ZHU Y,ISHIJ M,et al.. Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL[J]. SPIE,2004,5193:182-190. [11] OTAKI K,BONNEAU F,ICHIHARA Y. Absolute measurement of spherical surface by point diffraction interferometer[J]. SPIE,1999,3740:602-605. [12] JOHNSON M A,PHILLION D W,SOMMARGREN G E,et.al.. Construction and testing of wavefront reference sources for interferometry of ultra-precise imaging systems[J]. SPIE,2005,5869:58690P.

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