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Mo/Si多层膜小角X射线衍射结构表征

喻波

喻波. Mo/Si多层膜小角X射线衍射结构表征[J]. 中国光学(中英文), 2010, 3(6): 623-629.
引用本文: 喻波. Mo/Si多层膜小角X射线衍射结构表征[J]. 中国光学(中英文), 2010, 3(6): 623-629.
YU Bo. Structural characterization of Mo/Si multilayer by grazing incidence X-ray diffraction[J]. Chinese Optics, 2010, 3(6): 623-629.
Citation: YU Bo. Structural characterization of Mo/Si multilayer by grazing incidence X-ray diffraction[J]. Chinese Optics, 2010, 3(6): 623-629.

Mo/Si多层膜小角X射线衍射结构表征

基金项目: 

国家重大科技专项

详细信息
  • 中图分类号: O484.4; O436.1

Structural characterization of Mo/Si multilayer by grazing incidence X-ray diffraction

  • 摘要: 为了实现对Mo/Si多层膜的结构表征,测量了多层膜样品的小角X射线衍射谱。介绍了小角X射线衍射谱的分析方法,包括Bragg峰值拟合法,傅里叶变换法,反射谱拟合法。Bragg峰值拟合法和反射谱拟合法得到多层膜的周期厚度为7.09 nm,两种模型的反射谱拟合法得到界面的粗糙度(扩散长度)为0.40~0.41 nm(Si在Mo上),0.52~0.70 nm(Mo在Si上),前者要比后者小,这与透射电镜法(TEM)得到的结果0.40 nm(Si在Mo上),0.6~0.65 nm(Mo在Si上)是一致的。通过基于扩散模型的反射谱拟合法得到的折射率剖面也与由高倍率透射电镜(HRTEM)积分得到的灰度值剖面在趋势上是一致的。通过X射线衍射谱和TEM图像对Mo/Si多层膜进行综合表征,得到了多层膜的精细结构信息,这对多层膜制备工艺的优化具有十分重要的意义。

     

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出版历程
  • 收稿日期:  2010-05-11
  • 修回日期:  2010-08-13
  • 刊出日期:  2010-12-20

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