Progress of wavefront-division Fourier transform spectrometry in the vacuum ultraviolet
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摘要: 本文分析了真空紫外分波前傅里叶变换光谱技术原理、特点及其必要性,介绍了几种采用真空紫外分波前傅里叶变换光谱技术的光谱仪的代表性结构、性能和应用,探讨了国内真空紫外分波前傅里叶变换光谱技术的未来发展,为获得高分辨率真空紫外光谱提供了另一途径。Abstract: The principle, characteristics and necessity of vacuum ultraviolet wavefront-division Fourier transform spectrometry are analyzed in this paper. The typical structures, performances, and applications of several spectrometers using vacuum ultraviolet wavefront-division Fourier transform spectrometry are introduced. The future development of domestic vacuum ultraviolet wavefront-division Fourier transform spectrometry is discussed. Another approach is offered for obtaining high resolution vacuum ultraviolet spectra.
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Key words:
- vacuum ultraviolet /
- fourier transform spectrometer /
- wavefront-division
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图 1 中文真空紫外扫描式分波前干涉仪示意图。VUV-F，参考反射器；VUV-M，移动反射器；RW，参考楔；HeNe,HeNe稳频激光束；BS，分束器；FM，定镜名
Figure 1. Schematic of a VUV scanning wavefront-division interferometer. VUV-F:reference reflector; VUV-M:mobile reflector; RW:reference wedge; HeNe:HeNe frequency-stabilized laser beam; BS:beamsplitter; FM:fixed mirror
图 5 软X射线干涉仪实验示意图
Figure 5. Schematic diagram of the soft X-ray interferometer experiment
图 6 透射光栅式硅分束器方案设计
Figure 6. Proposed design of the transmission-grating silicon beamsplitter
图 9 改进型掠入射Mach-Zehnder干涉仪示意图
Figure 9. Schematic of the modified grazing-incidence Mach-Zehnder interferometer
图 10 改进型掠入射Mach-Zehnder干涉仪装置照片
Figure 10. Photograph of the modified grazing-incidence Mach-Zehnder interferometer set-up
图 11 分束器部分反射表面扫描电镜照片
Figure 11. SEM picture of partially reflective surface of beamsplitter
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