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摘要: 针对不同光学系统中存在的杂散光所造成的假信号或信号饱和影响，本文结合像面照度分析和消光环抑制的方法，对准直系统进行分析，找到产生杂散光的主要原因，设计了3种不同结构的消光环以消除杂散光。仿真实验结果确定了最优形式的消光环结构，边缘杂散光抑制最大下限值为0.38%，平均抑制值5.68×10-4%；以此模型为基础，进行了杂散光抑制实验。实验结果表明，带有消光环结构的准直系统可以有效抑制杂散光，保证了后续光学系统的功能实现，对其他杂散光抑制系统具有借鉴作用。Abstract: As for the negative influence of false signals and signal saturations caused by stray light in different optical systems, collimating system as an important subsystem is analyzed by combining the imaging illumination analysis and the extinction rings method, and the main causes of stray light are found out. Furthermore, three different structures of extinction rings are designed to eliminate the stray light. The optimal extinction rings structure is selected by a simulation experiment. Simulation results show that the largest degree of inhibition in the edge reaches 0.38% and the average degree of inhibition is 5.68×10-4%. The structure is actually manufactured and is tested by designed experiments. The result shows that stray light inhibition can be effectively realized in collimating system with optimal structure of the extinction ring. Therefore, this method has a reference value in other stray light suppression system.
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图 6 口径不匹配的杂散光像面仿真图
Figure 6. Image plane simulation diagram of stray light caused by mismatching aperture
图 7 3种消光环结构示意图
Figure 7. Schematic diagram of three kinds of right-angle extinction rings
图 11 失对准下的杂散光像面图
Figure 11. Stray light image plane diagram at the condition of misalignments
图 12 口径不匹配下的杂散光像面图
Figure 12. Stray light image plane diagram at the condition of mismatching aperture
表 1 准直系统光学参数
Table 1. Optical parameters of the collimating system
Index Value Object NA 0.22 Field/μm 400 Wavelength/μm 1.064 The interval between two lens/mm 59.27 
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表 2 不同视场下的光束出射角度与极限角度
Table 2. Divergence angle and limit angle of exit rays at different fields
The normalized field of view The divergence angleof exit rays θ1/(°) The limit angleof exit rays θ2/(°) 0 0 2.89 0.202 0.59 2.42 0.404 1.15 1.93 0.45 1.27 1.72 0.5 1.39 1.60 0.52 1.45 1.54 0.53 1.47 1.48 0.54 1.49 1.46 0.55 1.52 1.47 0.602 1.62 1.44 0.8 2.02 0.97 1 2.28 0.45
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表 3 3种消光环结构抑制效果表
Table 3. Suppression effect of three kinds of the extinction rings
No. Name Largest degree of inhibitionon stray light/% Average degree of inhibition on stray light/% 1 Extinction ring of right-angle with 30° 0.4 1.10×10-3 2 Extinction ring of right-angle with 60° 0.38 5.68×10-4 3 Extinction ring of congruent angle with 60° 0.63 1.49×10-3
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