Establishment and analysis of the diffraction bidirectional reflection distribution function model for surface defects
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摘要: 建立了包括划痕和坑点在内的表面损伤的衍射双向反射分布函数（BRDF）模型，并分析了模型在各领域中的应用。通过使用非傍轴标量衍射理论，提出了采用相干窗口函数滤波的方法得到非相干光条件下的表面损伤衍射BRDF模型，得到了表面划痕和坑点的散射特性。该方法在表面损伤检测、表面损伤杂光分析以及图像渲染技术等领域都有重要的应用价值。Abstract: The purpose of this paper is to establish a diffraction Bidirectional Reflection Distribution Function (BRDF) model of surface defects including scratches and pits, and to analyze the model being applied in various fields. By using nonparaxial scalar diffraction theory, a coherent window function filtering method is proposed, which can obtain the BRDF model of surface defect diffraction under incoherent light conditions. The effectiveness of the model is verified in related work, and the scattering characteristics of surface scratches and pits are obtained. The method and the results obtained by the model have high value in surface defect detection, surface defect stray light analysis and image rendering technology.
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图 2 波长为（a） 0.3 μm，（b） 0.5 μm及（c） 0.8 μm的划痕仿真结果
Figure 2. Simulation results of scratches with a wavelength of (a) 0.3 μm, (b) 0.5 μm and (c) 0.8 μm
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