-
摘要:
本文开展了多波长纳秒脉冲拉曼激光对行间转移CCD相机的损伤实验。分别研究了496 nm、574 nm、630 nm单波长拉曼激光与混合输出的多波长拉曼激光对CCD的点损伤、线损伤和面损伤情况，测量了不同波长拉曼激光的损伤阈值区间，并根据损伤情况统计拟合，获得了不同波长拉曼激光能量与损伤概率的关系曲线。实验结果表明：混合波长拉曼激光对CCD的损伤阈值低于单波长拉曼激光的损伤阈值，不同波长拉曼激光对于CCD的损伤阈值也存在区别，其中630 nm拉曼激光的损伤阈值低于496 nm激光，574 nm激光的损伤阈值介于496 nm和630 nm拉曼激光之间。在此基础上，通过分析CCD不同损伤情况的显微图像，以及受损伤CCD的电子学特性，对拉曼激光损伤CCD的机理进行了探讨。
Abstract:The damage threshold of an interline transfer CCD irradiated by different wavelength nanosecond Raman lasers was studied and an experiment with 496 nm, 574 nm, 630 nm Raman and multispectral Raman laser-irradiated CCD was carried out. The damage threshold interval of dot damage, line damage and total damage were observed and collected by adjusting the energy of each focused Raman laser. By careful fitting, the damage threshold interval and the damage possibility curve of the CCD at different laser energy densities with each Raman laser were estimated. Results showed that the multispectral Raman laser including a residual pump laser is most effective for damaging the CCD than the monochrome Raman laser, and the 630nm Raman laser acts better than 574 nm and the 496 nm Raman laser. The microscopic images of the damaged CCD were reviewed, and the electronic characters of the damaged CCD were also tested to understand the damage and blindness mechanism of a Raman laser pulse-irradiated CCD.
-
Key words:
- multi-wavelength laser /
- Raman laser /
- CCD /
- damage threshold
-
图 1 受激拉曼散射激光光源示意图
Figure 1. Schematic diagram of the experimental setup of multiple Raman lasers in a single Raman cell. L1-L2: lens; DM: Dichroic mirror; PBS: polarized beam splitter; Prism: Pellin-Broca prism
图 2 多波长拉曼激光损伤CCD实验装置
Figure 2. Experimental setup of multi-wavelength Raman lasers damage CCD. DM: Dichroic mirror; BS: beam splitter; DAC: data acquisition card
图 3 多波长拉曼激光光谱图
Figure 3. The spectrum of the multi-wavelength Raman laser used in this paper
图 4 不同波长拉曼激光在CCD上的聚焦图像
Figure 4. The focused spots of Raman laser with different wavelengths on the CCD
图 5 CCD损伤情况下的输出图像。（a）点损伤情况下CCD的输出图像；（b）出现线损伤情况下CCD的输出图像；(c) 面损伤情况下CCD的输出图像
Figure 5. The output images of the damaged CCD at different severities. (a) Dot damage; (b) line damage; (c) total damage.
图 6 496 nm拉曼激光照射CCD形成损伤类型及统计分析。（a）点损伤；（b）线损伤；（c）面损伤
Figure 6. The damage types and possibility of the CCD focused by the 496 nm Raman laser at different energy densities. (a) Dot damage; (b) line damage; (c) total damage
图 7 574 nm拉曼激光照射CCD形成损伤类型及统计分析。（a）点损伤；（b）线损伤；（c）面损伤
Figure 7. The damage types and possibility of the CCD focused by the 574 nm Raman laser at different energy densities. (a) Dot damage; (b) line damage; (c) total damage
图 8 630 nm拉曼激光照射CCD形成损伤类型及统计分析。（a）点损伤；（b）线损伤；（c）面损伤
Figure 8. The damage types and possibility of the CCD focused by the 630 nm Raman laser at different energy densities. (a) Dot damage; (b) line damage; (c) total damage
图 9 多波长混合激光照射CCD形成损伤类型及统计分析。（a）点损伤；（b）线损伤；（c）面损伤
Figure 9. The damage type and possibility of the CCD focused by the multi-wavelength lasers at different energy densities. (a) Dot damage; (b) line damage; (c) total damage
图 10 496 nm拉曼激光损伤CCD显微图。（a）点损伤；（b）线损伤；（c）面损伤
Figure 10. The micrographs of the CCD damaged by a 496 nm Raman laser at different severities. (a) Dot damage; (b) line damage; (c) total damage
图 11 574 nm拉曼激光损伤CCD显微图。（a）点损伤；（b）线损伤；（c）面损伤
Figure 11. The micrographs of the CCD damaged by a 574 nm Raman laser at different severities. (a) Dot damage; (b) line damage; (c) total damage
图 12 630 nm拉曼激光损伤CCD显微图。（a）点损伤；（b）线损伤；（c）面损伤
Figure 12. The micrographs of the CCD damaged by a 630 nm Raman laser at different severities. (a) Dot damage; (b) line damage; (c) total damage
图 13 混合波长拉曼激光损伤CCD显微图。(a)点损伤；(b)线损伤；(c)面损伤
Figure 13. The micrographs of the CCD damaged by the multi-wavelength lasers at different severities. (a) Dot damage; (b) line damage; (c) total damage
表 1 拉曼池输出的混合激光谱线的能量分布
Table 1. Energy distribution of the mixture laser from a Raman cell
激光波长/nm 脉冲能量/μJ 能量占比 聚焦光斑面积/(10−4 cm2) 496 2.8 3.2% 1.07 532 64.5 73.3% − 574 8.3 9.4% 0.713 630 11.5 13.1% 1.09 其他 0.9 1.1% − 混合激光 88 100% 2.73 
下载: 导出CSV
表 2 不同波长激光辐照下CCD的点损伤阈值，线损伤阈值和面损伤阈值拟合结果
Table 2. Fitting damage threshold of dot, line and total damage by different wavelength lasers
拉曼激光波长 点损伤阈值/mJ·cm−2 线损伤阈值/mJ·cm−2 面损伤阈值/mJ·cm−2 496 nm 8.66±0.13 86.8±2.0 308.6±18.5 574nm 9.57±0.85 38.85±0.27 113.1±3.5 630 nm 4.48±0.13 9.23±0.44 33.8±0.2 混合波长 2.46±0.02 8.53±0.18 35.0±0.0
下载: 导出CSV
-
[1] BECKER M F, ZHANG CH ZH, WATKINS S E, et al. Laser-induced damage to silicon CCD imaging sensors[J]. Processing of SPIE, 1989, 1105: 68-77. doi: 10.1117/12.960613 [2] BECKER M F, ZHANG CH ZH, BLARRE L, et al. Laser-induced functional damage to silicon CCD sensor arrays[J]. Processing of SPIE, 1992, 1624: 67-79. doi: 10.1117/12.60092 [3] ZHANG CH ZH, WATKINS S E, WALSER F M, et al. Laser-induced damage to silicon charged-coupled imaging devices[J]. Optical Engineering, 1991, 30(5): 651-657. doi: 10.1117/1.2221305 [4] 郝向南, 李化, 聂劲松, 等. 不同工作状态激光对可见光CCD的损伤实验[J]. 光电工程,2012,39(9):113-118.HAO X N, LI H, NIE J S, et al. Experiment of visible CCD damaged by laser operating in different state[J]. Opto-Electronic Engineering, 2012, 39(9): 113-118. (in Chinese) [5] 朱志武, 张震, 程湘爱, 等. 单脉冲激光对CCD探测器的硬损伤及损伤概率[J]. 红外与激光工程,2013,42(1):113-118. doi: 10.3969/j.issn.1007-2276.2013.01.021ZHU ZH W, ZHANG ZH, CHENG X A, et al. Damage phenomenon and probability of CCD detectors under single-laser-pulse irradiation[J]. Infrared and Laser Engineering, 2013, 42(1): 113-118. (in Chinese) doi: 10.3969/j.issn.1007-2276.2013.01.021 [6] 王明, 王挺峰, 邵俊峰. 面阵CCD相机的飞秒激光损伤分析[J]. 中国光学,2013,6(1):96-102.WANG M, WANG T F, SHAO J F, et al. Analysis of femtosecond laser induced damage to array CCD camera[J]. Chinese Optics, 2013, 6(1): 96-102. (in Chinese) [7] 邵俊峰, 刘阳, 王挺峰, 等. 皮秒激光对电荷耦合器件多脉冲损伤效应研究[J]. 兵工学报,2014,35(9):1408-1413. doi: 10.3969/j.issn.1000-1093.2014.09.012SHAO J F, LIU Y, WANG T F, et al. Damage effect of charged coupled device with multiple-pulse picosecond laser[J]. Acta Armamentarii, 2014, 35(9): 1408-1413. (in Chinese) doi: 10.3969/j.issn.1000-1093.2014.09.012 [8] 蔡跃, 叶锡生, 马志亮, 等. 170 ps激光脉冲辐照可见光面阵Si-CCD的实验[J]. 光学 精密工程,2011,19(2):457-462. doi: 10.3788/OPE.20111902.0457CAI Y, YE X S, MA ZH L, et al. Experiment of 170 ps laser pulse irradiation effect on visible plane array Si-CCD[J]. Optics and Precision Engineering, 2011, 19(2): 457-462. (in Chinese) doi: 10.3788/OPE.20111902.0457 [9] 赵洋, 金光勇, 李明欣, 等. 毫秒脉冲激光损伤CCD探测器的实验研究[J]. 激光技术,2017,41(5):632-636. doi: 10.7510/jgjs.issn.1001-3806.2017.05.003ZHAO Y, JIN G Y, LI M X, et al. Experimental study about CCD detectors damaged by millisecond pulsed laser[J]. Laser Technology, 2017, 41(5): 632-636. (in Chinese) doi: 10.7510/jgjs.issn.1001-3806.2017.05.003 [10] 张鑫, 牛春晖, 马牧燕, 等. 三波长单脉冲纳秒激光损伤CCD实验研究[J]. 应用激光,2020,40(2):300-307.ZHANG X, NIU CH H, MA M Y, et al. Experimental study on three-wavelength single-pulse nanosecond laser damage CCD[J]. Applied Laser, 2020, 40(2): 300-307. (in Chinese) [11] 王金宝. 激光辐照可见光面阵Si-CCD探测器实验研究[D]. 长沙: 国防科学技术大学, 2003.WANG J B. Experimental investigation of the visible light arrays of Si-CCD irradiated by the laser[D]. Changsha: National University of Defense Technology, 2003. (in Chinese) [12] 刘泽金, 陆启生, 蒋志平, 等. 面阵CCD图像传感器点破坏机理研究[J]. 应用激光,1995,15(2):85-86.LIU Z J, LU Q SH, JIANG ZH P, et al. Research on damaging mechanism of CCD video camera irradiated by a focusing laser beam[J]. Applied Laser, 1995, 15(2): 85-86. (in Chinese) [13] 周旋风, 张德锋, 王彦斌, 等. 激光辐照行间转移型CCD的串扰效应[J]. 光学 精密工程,2021,29(6):1225-1233. doi: 10.37188/OPE.20212906.1225ZHOU X F, ZHANG D F, WANG Y B, et al. Crosstalk effects of IT-CCD irradiated by laser[J]. Optics and Precision Engineering, 2021, 29(6): 1225-1233. (in Chinese) doi: 10.37188/OPE.20212906.1225 [14] 姜玉刚, 刘华松, 王利栓, 等. 卫星激光防护薄膜窗口的设计与制备技术研究[J]. 中国光学,2019,12(4):804-809. doi: 10.3788/co.20191204.0804JIANG Y G, LIU H S, WANG L SH, et al. Design and preparation technology of laser protective film window of satellite[J]. Chinese Optics, 2019, 12(4): 804-809. (in Chinese) doi: 10.3788/co.20191204.0804 [15] 周晟, 王凯旋, 刘定权, 等. 3.2~3.8 μm和4.9~5.4 μm红外双色滤光片的研制[J]. 中国光学,2021,14(3):536-543. doi: 10.37188/CO.2020-0206ZHOU SH, WANG K X, LIU D Q, et al. Research on infrared dual-color filters with 3.2~3.8 μm and 4.9~5.4 μm bands[J]. Chinese Optics, 2021, 14(3): 536-543. (in Chinese) doi: 10.37188/CO.2020-0206 [16] 陈柄言, 于永吉, 吴春婷, 等. 窄线宽1064 nm光纤激光泵浦高效率中红外3.8 μm MgO: PPLN光参量振荡器[J]. 中国光学,2021,14(2):361-367. doi: 10.37188/CO.2020-0169CHEN B Y, YU Y J, WU CH T, et al. High efficiency mid-infrared 3.8 μm MgO: PPLN optical parametric oscillator pumped by narrow linewidth 1064 nm fiber laser[J]. Chinese Optics, 2021, 14(2): 361-367. (in Chinese) doi: 10.37188/CO.2020-0169 [17] 徐飞, 潘其坤, 陈飞, 等. 中红外Fe2+: ZnSe激光器研究进展[J]. 中国光学,2021,14(3):458-469. doi: 10.37188/CO.2020-0180XU F, PAN Q K, CHEN F, et al. Development progress of Fe2+: ZnSe lasers[J]. Chinese Optics, 2021, 14(3): 458-469. (in Chinese) doi: 10.37188/CO.2020-0180 -
下载:
计量
- 文章访问数: 646
- HTML全文浏览量: 280
- PDF下载量: 287
- 被引次数: 0
