Measurement repeatability of high power laser measuring device based on light pressure
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摘要:
测量重复性是光压测量装置的最大不确定度分量，直接影响测量结果的准确性。为了在高功率激光测量过程中提高功率测量的准确度，搭建了基于光压的高功率激光测量装置，进行了质量测量重复性实验和激光功率测量重复性实验，对两个实验的结果进行了比较分析。实验结果显示，光压测量装置的测量重复性随被测质量和被测功率的增大而逐渐降低，表明光压方法在测量高功率激光时更具优势。在激光功率测量重复性实验中，由于避免了偏载和气流扰动的影响，因此激光功率测量重复性优于根据等效质量计算的测量重复性。研究结果对后续进一步提高光压方法的测量准确度具有指导意义。
Abstract:Measurement repeatability is the largest uncertainty component of a light pressure based measurement device, which directly affects the accuracy of the measurement results. In order to improve the accuracy of the measurement power in the process of high-power laser measurement, a high-power laser measuring device based on light pressure is built. Quality measurement repeatability and laser power measurement repeatability experiments were carried out, and the results of the two experiments were compared and analyzed. The experimental results show that the measurement repeatability of the light pressure measuring device gradually decreased with the increase of the measured mass and the measured laser power, indicating that the light pressure method has more advantages in measuring high-power lasers. In the laser power measurement repeatability experiment, the influence of eccentric loads and airflow disturbance is avoided, so the laser power measurement repeatability is better than the measurement repeatability calculated according to the equivalent mass. The research results have guiding significance for further improving the measurement accuracy of the light pressure method in the future.
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Key words:
- high power laser /
- light pressure /
- measurement repeatability /
- mass
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图 1 高功率激光测量系统的（a）示意图及（b）实物图
Figure 1. (a) Schematic diagram and (b) physical map of high power laser measurement system
图 3 1000 W至6000 W激光功率实验测量结果
Figure 3. Experimental measurement results of laser power from 1000 W to 6000 W
图 4 1000 W至6000 W激光功率测量重复性
Figure 4. Measurement repeatability of laser power from 1000 W to 6000 W
图 6 不同功率下光压等效质量测量点分布
Figure 6. Distributions of light pressure measurement points under different powers
图 7 计算合成重复性与实测激光功率重复性对比结果
Figure 7. Comparison of calculated synthetic repeatabilities and measured repeatability of laser power
表 1 理论计算与实际测量的重复性比较
Table 1. Comparison of repeatability between theoretical calculation and actual measurement
Laser
Power
/kWEquivalent
mass
/mgCalculated
synthetic
repeatability/%
(${m_r}$=7 μg)Calculated
synthetic
repeatability/%
(${m_r}$=5 μg)Measured
laser power
repeatability
y/%1.00 0.64 1.098 0.788 0.791 2.00 1.28 0.556 0.403 0.429 3.00 1.92 0.378 0.279 0.321 4.00 2.56 0.291 0.219 0.196 5.00 3.20 0.241 0.186 0.201 6.00 3.84 0.208 0.164 0.211 
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表 2 光压测量装置测量不确定度结果
Table 2. Uncertainty budgets of light pressure measuring device
Uncertainty
componentType 1 kW
(0.64 mg)3 kW
(1.92 mg)6 kW
(3.84 mg)Uncertainty of
standard weightsB 0.0016 0.0005 0.0003 Mirror reflectivity B 0.0003 0.0003 0.0003 Incidence angle B 0.0030 0.0030 0.0030 Repeatability A 0.0079 0.0032 0.0021 Resolution B 0.0045 0.0015 0.0008 Nonlinearity B 0.0010 0.0010 0.0010 Standard uncertainty (k=1) 0.976% 0.476% 0.390% Expanded uncertainty (k=2) 1.95% 0.96% 0.78%
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表 3 光压法与量热法测量结果比较
Table 3. Comparison of measurement results between the light pressure method and the calorimetric method
Measured power of calorimetric power meter/kW Measured mass/mg Measured power of light pressure power meter/kW Relative deviation/% 0.996 0.644 1.007 1.10 1.997 1.289 2.015 0.90 2.979 1.919 3.001 0.74 3.960 2.550 3.989 0.73 4.974 3.195 4.997 0.46 5.974 3.846 6.015 0.69
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