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光致热弹光谱气体检测技术研究进展

娄存广 代佳亮 李瑞凯 刘秀玲 姚建铨

娄存广, 代佳亮, 李瑞凯, 刘秀玲, 姚建铨. 光致热弹光谱气体检测技术研究进展[J]. 中国光学(中英文), 2023, 16(2): 229-242. doi: 10.37188/CO.2022-0137
引用本文: 娄存广, 代佳亮, 李瑞凯, 刘秀玲, 姚建铨. 光致热弹光谱气体检测技术研究进展[J]. 中国光学(中英文), 2023, 16(2): 229-242. doi: 10.37188/CO.2022-0137
LOU Cun-guang, DAI Jia-liang, LI Rui-kai, LIU Xiu-ling, YAO Jian-quan. Research progress of gas detection based on laser-induced thermoelastic spectroscopy[J]. Chinese Optics, 2023, 16(2): 229-242. doi: 10.37188/CO.2022-0137
Citation: LOU Cun-guang, DAI Jia-liang, LI Rui-kai, LIU Xiu-ling, YAO Jian-quan. Research progress of gas detection based on laser-induced thermoelastic spectroscopy[J]. Chinese Optics, 2023, 16(2): 229-242. doi: 10.37188/CO.2022-0137

光致热弹光谱气体检测技术研究进展

doi: 10.37188/CO.2022-0137
基金项目: 国家自然科学基金区域创新发展联合基金(No. U20A20224);河北省自然科学基金(No. F2021201005);河北省科技计划项目(No. 22321701D);河北省高等学校科学技术研究项目(No. ZD2022072)
详细信息
    作者简介:

    娄存广(1985—),男,山东聊城人,博士,副教授,硕士生导师,2012年于华南师范大学获得博士学位,2012—2015年任华南师范大学生物光子学学院讲师,2015年9月至今任河北大学电子信息工程学院副教授,主要研究方向为光学气体传感器和太赫兹光谱学。E-mail:loucunguang@163.com

    李瑞凯(1991—),男,河北邢台人,硕士,工程师。2017年于河北大学获得硕士学位,现为河北大学附属医院工程师。主要研究方向为电路与系统,光电检测技术与仪器。E-mail:liruikai_hbu@163.com

    姚建铨(1939—),男,江苏无锡人,教授,博士生导师,中国科学院院士,激光与光电子技术研究所所长,激光与非线性光学专家,现任天津大学激光与光电子研究所、精密仪器与光电子工程学院教授,主要研究方向为激光、非线性光学和太赫兹技术。E-mail:jqyao@tju.edu.cn

  • 中图分类号: O433.5+1;O439

Research progress of gas detection based on laser-induced thermoelastic spectroscopy

Funds: Supported by Regional Innovation and Development Joint Fund of National Natural Science Foundation of China (No. U20A20224); Natural Science Foundation of Hebei Province (No. F2021201005); Science and technology plan project of Hebei Province (No. 22321701D); Science and Technology Research Project of Higher Education Institutions of Hebei Province (No. ZD2022072)
More Information
  • 摘要:

    光致热弹光谱是一种基于石英音叉热弹效应的新型气体检测技术,具有成本低、体积小、灵敏度高及光谱响应范围宽等优点,是目前一种重要的痕量气体检测方法。本文首先分析了基于光致热弹光谱的气体浓度测量原理,其次,从提高检测系统灵敏度的各种技术方法角度出发,介绍了近年来开发的提高石英音叉热弹光谱系统检测灵敏度的技术方法,从信号幅值、信噪比、最小检出限和归一化噪声等效吸收系数等方面,对系统的性能改进提升效果进行评估。最后,简要评述了光致热弹光谱在现场气体检测中的应用研究进展,对进一步提高检测系统灵敏度的方法进行了总结与展望。

     

  • 图 1  石英音叉实物图及其谐振特性。(a) QTF照片; (b) QTF的振动特性曲线; (c) QTF的基本振动模式仿真

    Figure 1.  Photographic image and resonant characteristics of QTF. (a) Photograph of QTF; (b) vibration characteristic curve of QTF; (c) simulation analysis on fundamental vibration mode of QTF

    图 2  何应等人提出的LITES系统的实验装置及实验结果[25]。(a) 实验装置示意图; (b) TDLAS和LITES系统的2f信号和噪声

    Figure 2.  Experimental setup and experimental results of the LITES system proposed by He Ying et al.[25] (a) Schematic diagram of the experimental setup; (b) 2f signal and noise of TDLAS and LITES system. Reprinted with permission from Ref. [25] © The Optical Society.

    图 3  张秦端等人提出的LITES系统的实验装置及实验结果[29]。(a) LITES系统示意图; (b) 应用QTF自差技术前后的信号

    Figure 3.  Experimental setup and results of the LITES system proposed by Zhang Qinduan et al.[29] (a) Schematic diagram of the LITES system; (b) signals before and after applying QTF-self-difference technique

    图 4  卫婷婷等人提出的LITES系统的实验装置及实验结果[31]。(a) 实验装置示意图; (b) QTF在700 Torr和8 Torr 下测量的2f信号

    Figure 4.  Experimental setup and experimental results of the LITES system proposed by Wei Tingting et al..[31] (a) Schematic diagram of the experimental setup; (b) 2f signals measured by QTF at 700 Torr and 8 Torr. Reprinted with permission from Ref. [31] © The Optical Society.

    图 5  马欲飞等人提出的多音叉LITES系统的实验装置及实验结果[32]。(a) 基于两个腐蚀QTF的LITES示意图;(b) 测量的2f信号

    Figure 5.  Experimental setup and experimental results of multi-QTF LITES system proposed by Ma Yufei et al..[32] (a) Schematic diagram of LITES based on two corroded QTFs; (b) the measured 2f signal amplitude. Reprinted with permission from Ref. [32] © Elsevier.

    图 6  马欲飞等人提出的QEPAS-LITES系统实验装置及实验结果[34]。(a) 实验装置示意图;(b) 在25 °C和大气压下测量的2f信号;(c) T2=67.5 °C时测得的2f信号;(d) P2=500 Torr时测得的2f信号

    Figure 6.  Schematic diagram of experimental setup and experimental results of QEPAS-LITES system proposed by Ma Yufei et al..[34] (a) Schematic diagram of the experimental setup; (b) 2f signals measured at 25 °C and atmospheric pressure; (c) 2f signals measured at T2=67.5 °C; (d) 2f signals measured at P2=500 Torr. Reprinted with permission from Ref. [34] © Elsevier.

    图 7  乔顺达等人提出的S-QEDS系统实验装置及实验结果[35]。(a) 实验装置示意图;(b) S-QEDS、LITES和QEPAS系统的2f信号

    Figure 7.  Schematic diagram of the experimental device and experimental results of the S-QEDS system proposed by Qiao Shunda et al..[35] (a) Schematic diagram of the experimental setup; (b) 2f signal of the S-QEDS, LITES and QEPAS system. Reprinted with permission from Ref. [35] © The Optical Society.

    图 8  基于定制QTF的LITES系统示意图及实验结果。(a) 定制QTF的示意图[36];(b) LITES传感器示意图[37];(c) LITES 传感器系统的2f信号[37]

    Figure 8.  Schematic diagram of LITES system and experimental results based on customized QTF. (a) Schematic diagram of custom QTF[36]; (b) schematic diagram of the LITES sensor[37]; (c) 2f signal of LITES sensor systems[37]. Reprinted with permission from Ref. [37] © The Optical Society.

    图 9  涂有PDMS和rGO涂层的QTF和实验结果。(a) 具有PDMS和rGO涂层的QTF示意图[43]; (b) PDMS和rGO涂层QTF的SEM图像[41]; (c) 不同QTF检测到的300×10−6 NH3的2f信号[41]; (d) 图(c)中2f信号的幅值和SNR[41]

    Figure 9.  Schematic diagram and SEM of QTF with PDMS and rGO coating and corresponding experimental results. (a) Schematic diagram of QTF with PDMS and rGO coating[43]; Reprinted with permission from Ref. [43] © The Optical Society. (b) SEM image of QTF with PDMS and rGO coating[41]; (c) the 2f signal of 300×10−6 NH3 detected by different QTFs[41]; (d) the amplitude and SNR of 2f signals in figure (c)[41]

    图 10  CH4泄漏现场测量照片及CH4浓度随时间变化曲线[45]。(a-c)吉林大学校园远程燃气泄漏测量照片; (d) 作为测量时间函数的测量CH4浓度曲线

    Figure 10.  Photo of on-site measurement of CH4 leakage and curve of CH4 concentration varying with time[45]. (a-c) Photographs of the long-distance gas leakage measurement on Jilin University campus; (d) measured CH4 concentration curve as a function of measurement time

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  • 收稿日期:  2022-06-20
  • 修回日期:  2022-07-06
  • 录用日期:  2022-09-09
  • 网络出版日期:  2022-09-28

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