Design and analysis of the double-interface liquid lens based on a combination structure
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摘要:
为了提高液体透镜的成像质量和变焦范围，应用介电泳和液压驱动，设计了一款基于组合结构的双界面液体透镜，其主要由介电泳双液体透镜和PDMS薄膜液体透镜组成。首先，在Comsol软件中建立液体透镜模型，研究不同电压下的液滴界面和PDMS薄膜的面型变化，并导出两个曲面的面型数据。其次，在Matlab软件中，采用非球面表达式进行拟合，得到不同电压下液滴的界面和薄膜的面型图及其相应的非球面系数。最后，在Zemax软件中，构建出相应的双界面组合液体透镜光学模型，像面选取为高斯像面，并通过相应器件的制备与初步实验研究，将仿真结果和实验数据进行比较分析。结果表明，所设计的基于组合结构的双界面液体透镜仿真和实验的变焦范围基本一致，同时实验获得的变焦比可达
2.1254 、成像分辨率最大可达101.5937 lp/mm。本文设计的基于组合结构的双界面液体透镜具有结构简单紧凑、界面可调控性强、成像分辨率高的优点。Abstract:In order to improve the image quality and variable range of focal length of liquid lenses, a double-interface liquid lens based on a combination structure is designed utilizing dielectrophoretic and hydraulic drive mechanisms, which mainly consists of a dielectrophoretic double-liquid lens and a PDMS membrane liquid lens. First, the liquid lens model is established with Comsol software, the surface profile changes of droplets and PDMS membrane under different voltages are studied, and the surface profile data of two surfaces are derived. Second, the aspherical expression is used to fit with Matlab software, and the interface profiles of droplets and PDMS membrane under different voltages and the corresponding aspherical coefficient are obtained. Finally, the corresponding double-interface combined liquid lens optical model is built with Zemax software, and the image plane is selected as the Gaussian image plane. The simulation and experimental data are compared and analyzed through the corresponding device’s fabrication and the preliminary experimental research. The results show that the variable focal length range of the designed double-interface liquid lens based on the combined structure of the simulation is consistent with that of the experiment. Additionally, the results show that the zoom ratio and the imaging resolution can reach
2.1254 and101.5937 lp/mm, respectively. The double-interface liquid lens based on the combination structure has the advantages of a simple and compact structure, strong interface adjustability, and high resolution imaging.-
Key words:
- liquid lens /
- hydraulic drive /
- dielectrophoretic effect /
- double interfaces /
- PDMS membrane
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图 1 基于组合结构的双界面液体透镜结构示意图
Figure 1. Structral diagrams of the double-interface liquid lens based on combination structure
图 2 利用软件进行双界面组合液体透镜建模的仿真流程图
Figure 2. Simulation flow chart of the double-interface combined liquid lens modeling using software
图 3 利用Comsol软件建立的双界面组合液体透镜模型
Figure 3. The double-interface combined liquid lens modeling with Comsol software
图 4 利用Comsol拟合得到的不同电压下的液滴面型变化示意图
Figure 4. Schematic diagrams of droplet pattern changes fitted with Comsol under different voltages
图 5 不同电压下，拟合得到的液滴面型示意图
Figure 5. Schematic diagrams of the fitted surface of droplet interfaces under different voltages
图 6 PDMS膜在不同注液量下的Matlab拟合图。（a）注液量为0.05 mL；（b）注液量为0.3 mL
Figure 6. Fitting graphs of PDMS membrane fitted with Matlab under different volumes of injected liquid. Volume of injected liquid are (a) 0.05 mL and (b) 0.3 mL
图 7 未注入液体（0 mL）薄膜未形变时不同电压下的组合液体透镜的光路图
Figure 7. Optical path diagrams of the combined liquid lens without injected liquid (0 mL) and membrane non-deformation under different voltages
图 8 同一电压（200 V）不同注液量下的组合液体透镜光路图
Figure 8. Optical path diagrams of the combined liquid lens at the same voltage (200 V) under different volumes of injected liquid
图 9 所制备的基于组合结构的双界面液体透镜实物图。（a）注液量为 0 mL；（b）注液量为 0.2 mL
Figure 9. Physical drawing of the double-interface liquid lens based on combined structure. Volume of injected liquid are (a) 0 mL and (b) 0.2 mL
图 10 不同电压下的组合液体透镜的面型变化图
Figure 10. Surface variation of the combined liquid lens at different voltages
图 11 未注入液体（0 mL）薄膜未形变时不同电压下的仿真和实验的变焦范围对比图
Figure 11. Comparison of variable focal length range of the combined liquid lens without injected liquid (0 mL) and membrane non-deformation in simulation and experiment at different voltages
图 12 同一电压（200 V）不同注液量下的仿真和实验的变焦范围对比图
Figure 12. Comparison of variable focal length range of the combined liquid lens in simulation and experiment at the same voltage (200 V) under different injection volumes
图 13 不同电压和注液量下双界面组合液体透镜的分辨率图
Figure 13. Resolution diagrams of the double-interface combined liquid lens at different voltages under different injection volumes
表 1 不同电压下的液滴中心高度
Table 1. Heights of droplet center under different voltages
电压/V 高度/mm 0 1.703 40 1.711 80 1.736 120 1.777 160 1.835 200 1.888 
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表 2 双界面组合液体透镜光学模型的结构参数（200 V，0.05 mL）
Table 2. Structural parameters of the optical model of the double-interface combined liquid lens (200 V, 0.05 mL)
表面类型 曲率半径 厚度/ mm 材料 通光孔径/ mm b c d e f Object(标准面) 无限 无限 0 1(标准面) 无限 0.7 BK7 6.5 2(标准面) 无限 1.888 甲基硅油 1.6 STO(偶次非球面) 无限 2.112 去离子水 1.6 −0.195 −0.995 0.744 −0.234 0.025 4(标准面) 无限 0.7 BK7 6.5 5(标准面) 无限 10.760 去离子水 6.5 6 (偶次非球面) 无限 14.737 6.5 −0.018 −5.56×10−6 −6.28×10−9 9.19×10−11 −1.09×10−12 IMA(标准面) 无限 5.281
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