Research on CGH null compensation testing of high-order coaxial aspherical surfaces
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摘要:
为了解决同轴高次非球面的高精度面形检测问题，本文提出了一种基于CGH的同轴高次非球面零位补偿检测设计方法。利用所提方法，可以实现同轴非球面补偿设计中各衍射级次的有效分离，可实现对于待测镜面的零位补偿设计。结合工程实例，本文对一口径为260 mm的同轴高次非球面反射镜实现了零位补偿检测设计，从CGH设计结果可以看出，基于本文检测设计方法，其理论设计检测残差（RMS值）可以达到0 nm。此外，还完成了对于该同轴高次非球面反射镜的实际检测。针对检测过程中的误差源进行了误差分析，以验证本方法的可靠性与精度。
Abstract:In order to solve problems involved in high-precision surface map testing of coaxial high-order aspherical surfaces, this paper proposes a null compensation testing method based on CGH. Based on this method, the separation of the diffraction order in the coaxial aspherical compensation design can be effectively realized, and the null compensation design of the mirror to be measured can also be realized. Combined with engineering examples, this paper realizes a null compensation testing design for a coaxial high-order aspherical mirror with a 260 mm aperture. The CGH design results show that the theoretical design testing residual can reach 0 nm RMS value based on the design method described in this paper. The practical testing of the coaxial high-order aspherical mirror was also completed. To further analyze the testing results, error analysis was carried out on the error source in the testing process, to verify the reliability and accuracy of the method.
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图 9 主镜CGH补偿检测光路图
Figure 9. Optical path diagram of primary mirror CGH compensation testing
图 10 同轴高次非球面主镜面形检测结果
Figure 10. The detection results of the coaxial high-order aspherical primary mirror surface
图 11 CGH基板透射波像差结果
Figure 11. Transmission wavefront aberration results of CGH substrates
表 1 待测高次非球面镜基本参数
Table 1. Basic parameters of the high-order aspherical mirror
参数项 参数数值 D/mm 260 r −4.62×102 k 1.192×10−1 A4 2.936×10−11 A6 2.875×10−15 
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表 2 检测光路基本参数
Table 2. Basic parameters of the detection optical path
参数 数值 CGH基板 直径为100 mm； 厚度为15.07 mm；
距离L1= 93.76； L2= 496 mm干涉仪焦点坐标 F(0, −4)，单位mm 光阑参数 距离CGH后表面76.5 mm；直径1 mm 辅助对准区域(蓝色) 辅助CGH和干涉仪之间对准；辅助CGH和
平面镜直接对准；衍射级次5级基准投射区域(紫色) 在被检面处投射参考光斑；衍射级次1级 所投射4个光斑坐标 J(0, 132.14), Q(132.14, 0), K(0, -132.14),
A(−132.14, 0)，单位mm
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表 3 主区域光学设计结果
Table 3. Optical design results of main area
参数 数值 区域范围 半径为25.07 mm的圆 检测范围/mm 260 条纹密度估算/(lp·mm−1) 平均值为76，最密处为117.5 干涉仪焦点坐标 F(0, −4)，单位mm Zernike拟合残差 rms0.0000λ@632.8 nm
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表 4 主镜CGH误差源
Table 4. Primary mirror CGH error sources
误差项 数值(rms/λ) 备注 设计误差 0.00000 编码误差 0.00010 基板误差 0.0027 假定补偿其Z9及以下低阶项 刻划误差 0.0023 按位置误差σx=σy=30 nm 位置失调误差 0 检测时调整彗差到零 误差合成 0.00355 以RSS方式合成上述各项
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