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高精度非回转对称非球面加工方法研究

徐乐 张春雷 代雷 张健

徐乐, 张春雷, 代雷, 张健. 高精度非回转对称非球面加工方法研究[J]. 中国光学(中英文), 2016, 9(3): 364-370. doi: 10.3788/CO.20160903.0364
引用本文: 徐乐, 张春雷, 代雷, 张健. 高精度非回转对称非球面加工方法研究[J]. 中国光学(中英文), 2016, 9(3): 364-370. doi: 10.3788/CO.20160903.0364
XU Le, ZHANG Chun-lei, DAI Lei, ZHANG Jian. Research on manufacturing method of non-rotationally symmetrical aspheric surface with high accuracy[J]. Chinese Optics, 2016, 9(3): 364-370. doi: 10.3788/CO.20160903.0364
Citation: XU Le, ZHANG Chun-lei, DAI Lei, ZHANG Jian. Research on manufacturing method of non-rotationally symmetrical aspheric surface with high accuracy[J]. Chinese Optics, 2016, 9(3): 364-370. doi: 10.3788/CO.20160903.0364

高精度非回转对称非球面加工方法研究

doi: 10.3788/CO.20160903.0364
基金项目: 

国家科技重大专项资助项目 No.2009ZX02205

详细信息
    通讯作者:

    徐乐(1987-),男,吉林长春人,硕士,研究实习员,2007年、2014年于北京理工大学分别获得学士、硕士学位,主要从事光学精密加工方面的研究。E-mail:xule198711@163.com

  • 中图分类号: TQ171.684

Research on manufacturing method of non-rotationally symmetrical aspheric surface with high accuracy

Funds: 

Supported by National Major S&T Special Project of China No.2009ZX02205

  • 摘要: 本文提出一种高精度非回转对称非球面加工方法。首先,通过范成法铣磨出非回转对称非球面的最佳拟合球;然后,利用古典抛光修正小磨头确定抛光难以修正的中频误差;最后,利用高精度气囊抛光设备(IRP)精确对位精修面形,在不引入额外中频误差条件下,通过高精度对位检测技术实现非回转对称非球面高精度加工。将该方法应用于定点曲率半径为970.737 mm、k=-1、口径为106 mm三次非球面加工,降低了加工难度,提高了加工精度,面形误差收敛到1/30λ(RMS)。实验结果验证了本文加工方法的正确性和可行性,对高精度非回转对称非球面加工具有一定的指导意义。

     

  • 图 1  非球面偶次项面形干涉图

    Figure 1.  Surface shape interferogram of even-order aspheric surface

    图 2  非球面非回转对称项面形干涉图

    Figure 2.  Surface shape interferogram of non-rotationally symmetrical aspheric surface

    图 3  非球面与最佳拟合球面形差

    Figure 3.  Difference of surface shape interferogram between asphere and optimum fitting sphere

    图 4  快速抛光干涉图

    Figure 4.  Interferogram of fast polishing

    图 5  光顺抛光干涉图和1~3 mm带通滤波结果

    Figure 5.  Inferferogram after smoothing polishing and filter result of 1-3 mm bandpass

    图 6  需要面形精修的面形误差

    Figure 6.  Error map of surface shape to be fine polished

    图 7  最终面形误差

    Figure 7.  Final error map of surface shape

    图 8  不同转角时的面型误差

    Figure 8.  Error map of surface shape rotated by different angles

    图 9  Uninap抛光膜加工前后PSD曲线

    Figure 9.  PSD curves before and after processing by Uninap

    表  1  本文选用的非球面参数

    Table  1.   Parameters of aspheric surface in this paper

    CkDαβRφ
    -1/970.737-15300.001 253101.4
    下载: 导出CSV
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出版历程
  • 收稿日期:  2016-01-26
  • 修回日期:  2016-02-19
  • 刊出日期:  2016-01-25

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