集成PIN光敏元的CMOS探测器光电响应特性研究

杨成财; 鞠国豪; 陈永平

doi:10.3788/CO.20191205.1076

集成PIN光敏元的CMOS探测器光电响应特性研究

doi: 10.3788/CO.20191205.1076

杨成财^{1, 2,},
鞠国豪^{1, 2, 3},
陈永平^1, ,

1.
中国科学院上海技术物理研究所红外成像材料与器件重点实验室, 上海 200083
2.
中国科学院大学, 北京 100049
3.
上海科技大学信息科学与技术学院, 上海 201210

详细信息

中图分类号: TN2;O472+.8
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出版历程
- 收稿日期: 2018-11-07
- 修回日期: 2018-12-29
- 刊出日期: 2019-10-01

Study on the photo response of a CMOS sensor integrated with PIN photodiodes

YANG Cheng-cai^{1, 2
,},
JU Guo-hao^{1, 2, 3},
CHEN Yong-ping^{1
, ,}

1.
Key Laboratory of Infrared Imaging Materials and Detectors, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
2.
University of Chinese Academy of Sciences, Beijing 100049, China
3.
School of Information Science & Technology, Shanghai Tech University, Shanghai 201210, China

More Information

Author Bio:
YANG Cheng-cai (1992-):Tai'An, Shandong Province, Graduated from Northeastern University in 2016, and currently pursuing a master's degree in Shanghai Institute of Technical Physics, Chinese Academy of Sciences.He mainly engages in the research of CMOS image sensor design and read-out circuits design.E-mail:tomasyoung@mail.ustc.edu.cn

CHEN Yong-ping (1963-):Professor, Shanghai Institute of Technical Physics, Chinese Academy of Sciences.His research interests are on design of high-performance CMOS image sensors.E-mail:chen_yp@mail.sitp.ac.cn

Corresponding author: CHEN Yong-ping, E-mail:chen_yp@mail.sitp.ac.cn

摘要

摘要: 传统的CMOS图像传感器一般采用基于LV-CMOS工艺的N阱/P型衬底制备的PN光电二极管或者PPD二极管作为光敏元。PIN光敏元具有结电容小、量子效率高的特点。采用HV-CMOS（高压CMOS）工艺可以实现CMOS电路与PIN光敏元的单片集成。本文研究了集成PIN光敏元的CMOS探测器的光电响应特性以及NEP随像素大小和复位电压的变化关系。研究表明，将光敏元从PN光电二极管改为PIN光电二极管后，像素电荷增益可以提高一个数量级左右；同时，像素的瞬态电荷增益要大于传统认为的1/C_pd，并与二极管的大小以及复位电压紧密相关。研究发现，小像素因其更高的电荷增益和更低的等效噪声，更加适合弱信号下的短积分时间快速探测。若配合微透镜的使用，小像素在微光探测方面可以获得更大的优势。
- CMOS图像传感器 /
- HV-CMOS /
- PIN光电二极管 /
- 3T像素结构
Abstract: Traditional CMOS image sensors generally use PN photodiodes or PPDs as the photosensitive element, which are formed based on N-well/P-type substrates using the LV-CMOS process. The PIN photosensitive element has small junction capacitance and high quantum efficiency. By using High-Voltage CMOS(HV-CMOS), monolithic integration of CMOS circuits with PIN photodiodes can be achieved. In this paper, the relationship between the photo-response characteristics, NEP of CMOS detectors and pixel size and reset voltage are studied. The results show that the pixel charge gain can be increased by about one order of magnitude when the photosensitive element is changed from PN to PIN and the transient charge gain of the pixel is larger than 1/C_pd. This is closely related to the size of the diode and reset voltage. It is found that small pixels are more suitable for fast detection of short integration time under weak signals because of their higher charge gain and lower equivalent noise. If combined with microlenses, small pixels can be further advantageous in low light detection.
- CMOS image sensor /
- HV-CMOS /
- PIN photodiodes /
- 3T pixel structure

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图 1 HV-CMOS工艺示意图

Figure 1. Schematic diagram of HV-CMOS process

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图 2 PIN光敏元与CMOS电路单片集成

Figure 2. Monolithic integration of PIN photosensitive element and CMOS circuit

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图 3 HV-CMOS工艺中的3T像素结构

Figure 3. 3T pixel structure in HV-CMOS process

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图 4 CMOS传感器读出电路

Figure 4. Read-out circuit in CMOS sensor

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图 5 PN和PIN空间电荷区

Figure 5. Space charge regions of PN and PIN

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图 6 结电容随偏压变化关系

Figure 6. Relationship between junction capacitance and bias voltage

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图 7 结电容与像素大小的关系

Figure 7. Relationship between junction capacitance and pixel size

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图 8 暗电流与偏置电压大小的关系

Figure 8. Relationship between dark current and bias voltage

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图 9 暗电流与尺寸L的变化关系

Figure 9. Relationship between dark current and pixel size

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图 10 结电压与光电流关系

Figure 10. Relationship between junction voltage and photo current

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图 11 光信号电压变化与光电流关系

Figure 11. Relationship between photo signal voltage variation and photo current

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图 12 瞬态电荷转换增益随光电流变化关系

Figure 12. Relationship between transient charge conversion gain and photo current variance

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图 13 瞬态电荷增益与电容值倒数的比较

Figure 13. Comparison between transient charge gain and the reciprocal of capacitance value

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图 14 CTIA结构示意图

Figure 14. Schematic diagram of a CTIA structure

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图 15 NEP与像素大小的关系

Figure 15. Relationship between NEP and pixel size

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表 1 公式参数

Table 1. Formula parameters

Parameter	PN photodiode(LV-CMOS)	PIN photodiode(HV-CMOS)
Area junction capacitance for zero bias:CJ	97 pF/mm²	0.93 pF/mm²
Area capacitance grading coefficient:MJ	0.31	0.05
Area capacitance junction potentials:PB	0.42 V	0.31 V
Perimeter junction capacitance for zero bias:CJSW	0.52 pF/mm	0.35 pF/mm
Perimeter capacitance grading coefficient:MJSW	0.21	0.21
Perimeter capacitance junction potentials:PBSW	0.38 V	0.16 V
Area leakage current density:JS	1.27 pA/mm²	2.07 pA/mm²
Perimeter leakage current density:JSSW	28.8 fA/mm	2.91 pA/mm
Voltage dependent area leakage conductivity:GLEAK	0 pA/V/mm²	0 pA/V/mm²
Voltage dependent perimeter leakage conductivity:GLEAKSW	44 fA/V/mm	1.29 pA/V/mm

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